Fabrication of Silicon Qubits

Presentations

• State-of-the-art Quantum Dot devices from a full 300mm process line: towards scalable spin qubit devices

  ORAL

  March 6, 2020, 11:15 AM – March 6, 2020, 11:27 AM

  Presenters

  • Hubert C George

    • Components Research, Intel Corporation, Hillsboro, OR, USA
    • Components Research, Intel Corporation
    • Intel Corporation

  Authors

  • Hubert C George

    • Components Research, Intel Corporation, Hillsboro, OR, USA
    • Components Research, Intel Corporation
    • Intel Corporation

  • Stephanie Bojarski

    • Components Research, Intel Corporation, Hillsboro, OR, USA
    • Components Research, Intel Corporation
    • Intel Corporation

  • Ravi Pillarisetty

    • Components Research, Intel Corporation
    • Intel Corporation

  • Brennen Mueller

    • Components Research, Intel Corporation, Hillsboro, OR, USA
    • Components Research, Intel Corporation
    • Intel Corporation

  • Lester Lampert

    • Components Research, Intel Corporation
    • Intel Corporation

  • Thomas Watson

    • Components Research, Intel Corporation
    • Intel Corporation

  • Florian Luthi

    • Components Research, Intel Corporation
    • Intel Corporation

  • Roman Caudillo

    • Components Research, Intel Corporation
    • Intel Corporation

  • David J Michalak

    • Components Research, Intel Corporation
    • Intel Corporation

  • Eric Henry

    • Components Research, Intel Corporation
    • Intel Corporation

  • Otto Zietz

    • Components Research, Intel Corporation
    • Intel Corporation

  • Jeanette Marie Roberts

    • Components Research, Intel Corporation
    • Intel Corporation

  • Anne-Marije Zwerver

    • QuTech and Kavli Institute of Nanoscience, TU Delft, The Netherlands
    • QuTech and Kavli Institute of Nanoscience

  • Tobias Krähenmann

    • QuTech and Kavli Institute of Nanoscience

  • Harmen Eenink

    • Delft University of Technology
    • QuTech and Kavli Institute of Nanoscience

  • Giordano Scappucci

    • Delft University of Technology
    • QuTech and Kavli Institute of Nanoscience
    • QuTech and Kavli Institute of Nanoscience, Delft University of Technology
    • QuTech, Delft University of Technology
    • Delft University of Technology, Delft, The Netherlands

  • Menno Veldhorst

    • Delft University of Technology
    • QuTech and Kavli Institute of Nanoscience
    • University of Twente
    • QuTech, Delft University of Technology
    • Delft University of Technology, Delft, The Netherlands

  • Lieven M Vandersypen

    • QuTech and Kavli Institute of Nanoscience, TU Delft, The Netherlands
    • QuTech and Kavli Institute of Nanoscience
    • QuTech and Kavli Institute of Nanoscience, Delft University of Technology
    • Delft University of Technology
    • Delft University of Technology, Delft, The Netherlands

  • Jim Clarke

    • Components Research, Intel Corporation, Hillsboro, OR, USA
    • Components Research, Intel Corporation
    • Intel Corporation

  View abstract →

• The impact of using palladium gates for silicon quantum dot fabrication: defect densities and strain

  ORAL

  March 6, 2020, 11:27 AM – March 6, 2020, 11:39 AM

  Presenters

  • Ryan Stein

    • University of Maryland, College Park
    • National Institute of Standards and Technology

  Authors

  • Ryan Stein

    • University of Maryland, College Park
    • National Institute of Standards and Technology

  • Zac Barcikowski

    • University of Maryland, College Park

  • Joshua Pomeroy

    • National Institutue of Standards and Technology
    • National Institute of Standards and Technology

  • Michael David Stewart

    • National Institutue of Standards and Technology
    • National Institute of Standards and Technology

  View abstract →

• Revising the point-charge model for dopants in Si and applications to atomic-scale system simulations

  ORAL

  March 6, 2020, 11:39 AM – March 6, 2020, 11:51 AM

  Presenters

  • Keyi Liu

    • University of Maryland, College Park

  Authors

  • Keyi Liu

    • University of Maryland, College Park

  • Piotr T. Rozanski

    • Institute of Physics, Nicholaus Copernicus University

  • Michal Zielinski

    • Institute of Physics, Nicholaus Copernicus University

  • Garnett Bryant

    • Nanoscale Device Characterization Division, National Institute of Standards and Technology
    • National Institute of Standards and Technology

  View abstract →

• Low-frequency electron spin-qubit detuning noise in highly purified ²⁸Si/SiGe

  ORAL

  March 6, 2020, 11:51 AM – March 6, 2020, 12:03 PM

  Presenters

  • Lars Schreiber

    • RWTH - Aachen
    • RWTH Aachen University

  Authors

  • Tom Struck

    • RWTH Aachen University

  • Arne Hollmann

    • RWTH Aachen University

  • Floyd Schauer

    • Universität Regensburg

  • Andreas Schmidbauer

    • Universität Regensburg

  • Veit Langrock

    • Forschungszentrum Jülich
    • JARA-FIT Institute Quantum Information Forschungszentrum Jülich and RWTH Aachen

  • Olexiy Fedorets

    • RWTH Aachen University

  • Kentarou Sawano

    • Tokyo City University

  • Helge Riemann

    • Leibniz-Institut für Kristallzüchtung

  • Nikolay V Abrosimov

    • Leibniz-Institut für Kristallzüchtung

  • Lukasz Cywinski

    • Polish Academy of Sciences

  • Dominique Bougeard

    • Universität Regensburg
    • University of Regensburg

  • Lars Schreiber

    • RWTH - Aachen
    • RWTH Aachen University

  View abstract →

• Single-electron control in a foundry-fabricated 2D array of silicon quantum dots

  ORAL

  March 6, 2020, 12:03 PM – March 6, 2020, 12:15 PM

  Presenters

  • Fabio Ansaloni

    • Univ of Copenhagen

  Authors

  • Fabio Ansaloni

    • Univ of Copenhagen

  • Anasua Chatterjee

    • Univ of Copenhagen
    • Niels Bohr Institute, University of Copenhagen
    • Center for Quantum Devices, Niels Bohr Institute, University of Copenhagen, Universitetsparken 5, 2100 Copenhagen, Denmark.

  • Heorhii Bohuslavskyi

    • Univ of Copenhagen

  • Ferdinand Kuemmeth

    • Univ of Copenhagen

  View abstract →

• Spin Qubits Confined to a Silicon Nano-Ridge

  ORAL

  March 6, 2020, 12:15 PM – March 6, 2020, 12:27 PM

  Presenters

  • Jan Klos

    • RWTH - Aachen

  Authors

  • Jan Klos

    • RWTH - Aachen

  • Bin Sun

    • RWTH - Aachen

  • Jacob Beyer

    • RWTH - Aachen

  • Sebastian Kindel

    • RWTH - Aachen

  • Lena Hellmich

    • RWTH - Aachen

  • Joachim Knoch

    • RWTH - Aachen

  • Lars Schreiber

    • RWTH - Aachen
    • RWTH Aachen University

  View abstract →

• Silicon spin qubit development in a 300 mm integrated process

  ORAL

  March 6, 2020, 12:27 PM – March 6, 2020, 12:39 PM

  Presenters

  • Nard Dumoulin Stuyck

    • KU Leuven, imec

  Authors

  • Nard Dumoulin Stuyck

    • KU Leuven, imec

  • Roy Li

    • IMEC

  • Stefan Kubicek

    • IMEC

  • Fahd A Mohiyaddin

    • IMEC

  • Bogdan Govoreanu

    • IMEC

  • Asser Elsayed

    • KU Leuven, imec

  • Mohamed Shehata

    • KU Leuven, imec

  • Julien Jussot

    • IMEC

  • BT Chan

    • IMEC

  • Iuliana Radu

    • IMEC

  • Marc Heyns

    • KU Leuven, imec
    • IMEC

  View abstract →

• Industrial quantum dot arrays for spin-qubit quantum computation by all-optical 300mm lithography

  ORAL

  March 6, 2020, 12:39 PM – March 6, 2020, 12:51 PM

  Presenters

  • Tobias Krähenmann

    • QuTech and Kavli Institute of Nanoscience, TU Delft, The Netherlands

  Authors

  • Tobias Krähenmann

    • QuTech and Kavli Institute of Nanoscience, TU Delft, The Netherlands

  • Anne-Marije Zwerver

    • QuTech and Kavli Institute of Nanoscience, TU Delft, The Netherlands
    • QuTech and Kavli Institute of Nanoscience

  • Stephanie Bojarski

    • Components Research, Intel Corporation, Hillsboro, OR, USA
    • Components Research, Intel Corporation
    • Intel Corporation

  • Hubert C George

    • Components Research, Intel Corporation, Hillsboro, OR, USA
    • Components Research, Intel Corporation
    • Intel Corporation

  • Brennen Mueller

    • Components Research, Intel Corporation, Hillsboro, OR, USA
    • Components Research, Intel Corporation
    • Intel Corporation

  • Jim Clarke

    • Components Research, Intel Corporation, Hillsboro, OR, USA
    • Components Research, Intel Corporation
    • Intel Corporation

  • Lieven M Vandersypen

    • QuTech and Kavli Institute of Nanoscience, TU Delft, The Netherlands
    • QuTech and Kavli Institute of Nanoscience
    • QuTech and Kavli Institute of Nanoscience, Delft University of Technology
    • Delft University of Technology
    • Delft University of Technology, Delft, The Netherlands

  View abstract →

• Pauli spin blockade for holes in a hot silicon FinFET

  ORAL

  March 6, 2020, 12:51 PM – March 6, 2020, 1:03 PM

  Presenters

  • Simon Geyer

    • Department of Physics, University of Basel

  Authors

  • Simon Geyer

    • Department of Physics, University of Basel

  • Leon Camenzind

    • Department of Physics, University of Basel
    • University of Basel

  • Richard J. Warburton

    • Department of Physics, University of Basel

  • Dominik Zumbuhl

    • University of Basel
    • Department of Physics, University of Basel
    • Department of Physics, University of Basel, CH-4056, Basel, Switzerland

  • Andreas V. Kuhlmann

    • Department of Physics, University of Basel

  View abstract →

• Crossbar architecture with individually addressable single electron transistors

  ORAL

  March 6, 2020, 1:03 PM – March 6, 2020, 1:15 PM

  Presenters

  • Peter Bavdaz

    • Delft University of Technology

  Authors

  • Peter Bavdaz

    • Delft University of Technology

  • Harmen Eenink

    • Delft University of Technology
    • QuTech and Kavli Institute of Nanoscience

  • Job van Staveren

    • Delft University of Technology

  • Carmina Almudever

    • Delft University of Technology
    • QuTech, Delft University of Technology

  • Fabio Sebastiano

    • Delft University of Technology
    • Delft University of Technology, Delft, The Netherlands

  • Menno Veldhorst

    • Delft University of Technology
    • QuTech and Kavli Institute of Nanoscience
    • University of Twente
    • QuTech, Delft University of Technology
    • Delft University of Technology, Delft, The Netherlands

  • Giordano Scappucci

    • Delft University of Technology
    • QuTech and Kavli Institute of Nanoscience
    • QuTech and Kavli Institute of Nanoscience, Delft University of Technology
    • QuTech, Delft University of Technology
    • Delft University of Technology, Delft, The Netherlands

  View abstract →

• Silicon quantum dot fabrication with subtractive processing

  ORAL

  March 6, 2020, 1:15 PM – March 6, 2020, 1:27 PM

  Presenters

  • Thomas McJunkin

    • University of Wisconsin - Madison
    • Department of Physics, University of Wisconsin-Madison, Madison, WI 53706, USA

  Authors

  • Thomas McJunkin

    • University of Wisconsin - Madison
    • Department of Physics, University of Wisconsin-Madison, Madison, WI 53706, USA

  • Evan R MacQuarrie

    • University of Wisconsin - Madison
    • Department of Physics, University of Wisconsin-Madison, Madison WI, USA
    • Department of Physics, University of Wisconsin-Madison, Madison, WI 53706, USA

  • Mark Alan Eriksson

    • University of Wisconsin - Madison
    • Physics, University of Wisconsin - Madison, Madison, WI USA
    • Department of Physics, University of Wisconsin-Madison, Madison WI, USA
    • Department of Physics, University of Wisconsin-Madison, Madison, WI 53706, USA
    • University of Wisconsin-Madison

  View abstract →

• Charge and Hybrid Qubits in 22nm FDSOI process

  ORAL

  March 6, 2020, 1:27 PM – March 6, 2020, 1:39 PM

  Presenters

  • Elena Blokhina

    • School of Electrical and Electronic Engineering, UCD

  Authors

  • Elena Blokhina

    • School of Electrical and Electronic Engineering, UCD

  • Panagiotis Giounanlis

    • School of Electrical and Electronic Engineering, UCD

  • Dirk R Leipold

    • Equal1 Labs

  • Imran Bashir

    • Equal1 Labs

  • Mike Asker

    • Equal1 Labs

  • Ali Esmailiyan

    • School of Electrical and Electronic Engineering, UCD

  • Hongying Wang

    • School of Electrical and Electronic Engineering, UCD

  • Teerachot Siriburanon

    • School of Electrical and Electronic Engineering, UCD

  • Andrii Sokolov

    • School of Electrical and Electronic Engineering, UCD

  • R.Bogdan Staszewski

    • School of Electrical and Electronic Engineering, UCD

  View abstract →

• Improving Gate Dielectrics for Reducing Charge Noise in Si/SiGe Quantum Dots

  ORAL

  March 6, 2020, 1:39 PM – March 6, 2020, 1:51 PM

  Presenters

  • Nathan Holman

    • University of Wisconsin - Madison
    • Department of Physics, University of Wisconsin-Madison, Madison WI, USA

  Authors

  • Nathan Holman

    • University of Wisconsin - Madison
    • Department of Physics, University of Wisconsin-Madison, Madison WI, USA

  • John Dodson

    • University of Wisconsin - Madison

  • Evan MacQuarrie

    • University of Wisconsin - Madison

  • Lisa F Edge

    • HRL
    • HRL laboratories, LLC, 3011 Malibu Canyon Road, Malibu, CA 90265, USA
    • HRL Laboratories
    • HRL Laboratories LLC, 3011 Malibu Canyon Road, Malibu, California 90265, USA
    • HRL Laboratories, LLC

  • Robert F McDermott

    • University of Wisconsin - Madison
    • Department of Physics, University of Wisconsin-Madison, Madison WI, USA
    • Physics, University of Wiconsin - Madison

  • Susan Nan Coppersmith

    • University of Wisconsin - Madison
    • University of New South Wales, Sydney, Australia
    • Department of Physics, University of Wisconsin-Madison
    • University of Wisconsin-Madison
    • University of New South Wales
    • University of Wisconsin-Madison, The University of New South Wales

  • Mark G Friesen

    • University of Wisconsin - Madison
    • Department of Physics, University of Wisconsin-Madison, Madison WI, USA
    • University of Wisconsin-Madison

  • Mark Alan Eriksson

    • University of Wisconsin - Madison
    • Physics, University of Wisconsin - Madison, Madison, WI USA
    • Department of Physics, University of Wisconsin-Madison, Madison WI, USA
    • Department of Physics, University of Wisconsin-Madison, Madison, WI 53706, USA
    • University of Wisconsin-Madison

  View abstract →

• Charge noise in Si/SiGe quantum dots

  ORAL

  March 6, 2020, 1:51 PM – March 6, 2020, 2:03 PM

  Presenters

  • Elliot Connors

    • University of Rochester

  Authors

  • Elliot Connors

    • University of Rochester

  • JJ Nelson

    • University of Rochester

  • Haifeng Qiao

    • University of Rochester

  • John Nichol

    • University of Rochester

  View abstract →