Enabling technologies for increased circuit complexity of high-coherence superconducting qubits: Part 2
ORAL
Abstract
As quantum computing with superconducting qubits increases in complexity, 3D integration will enable increased density of control and readout circuitry. One approach is to bond chips that perform different functionalities using indium bumps. MIT Lincoln Laboratory has integrated silicon hard-stop mesas to achieve reliable spacing and tilt between chips during bump bonding. Here we will describe further development of hard-stop mesas, assessment of tilt and integration into high-coherence superconducting qubit fabrication.
*This research was funded by the Office of the Director of National Intelligence (ODNI), Intelligence Advanced Research Projects Activity (IARPA) under Air Force Contract No. FA8721-05-C-0002. The views and conclusions contained herein are those of the authors and should not be interpreted as necessarily
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Presenters
David Kim
MIT Lincoln Laboratory
MIT Lincoln Lab
Lincoln Laboratory, Massachusetts Institute of Technology
Massachusetts Inst of Tech-MIT
Lincoln Laboratory, Massachusetts Inst of Tech-MIT
Authors
David Kim
MIT Lincoln Laboratory
MIT Lincoln Lab
Lincoln Laboratory, Massachusetts Institute of Technology
Massachusetts Inst of Tech-MIT
Lincoln Laboratory, Massachusetts Inst of Tech-MIT
Jonilyn Yoder
Massachusetts Institute of Technology
MIT Lincoln Laboratory
Rabindra Das
MIT Lincoln Laboratory
MIT Lincoln Lab
Massachusetts Inst of Tech-MIT
Danna Rosenberg
MIT Lincoln Laboratory
MIT Lincoln Lab
Massachusetts Inst of Tech-MIT
Lincoln Laboratory, Massachusetts Inst of Tech-MIT
Peter Baldo
MIT Lincoln Laboratory
Gregory Calusine
MIT Lincoln Laboratory
Michael Hellstrom
MIT Lincoln Laboratory
Bethany Niedzielski
MIT Lincoln Laboratory
Justin Mallek
MIT Lincoln Lab
Massachusetts Inst of Tech-MIT
MIT Lincoln Laboratory
Alexander Melville
MIT Lincoln Laboratory
MIT Lincoln Lab
Massachusetts Inst of Tech-MIT
Brenda Osadchy
MIT Lincoln Laboratory
Donna-Ruth Yost
MIT Lincoln Lab
Massachusetts Inst of Tech-MIT
MIT Lincoln Laboratory
Livia Racz
MIT Lincoln Laboratory
William Oliver
MIT Lincoln Laboratory
MIT Lincoln Lab
Massachusetts Institute of Technology & MIT Lincoln Laboratory
Department of Physics, Research Laboratory of Electronics, Lincoln Laboratory, Massachusetts Institute of Technology
Massachusetts Inst of Tech-MIT
Department of Physics, Research Laboratory of Electronics, Lincoln Laboratory, Massachusetts Inst of Tech-MIT
MIT
Lincoln Laboratory, Research Laboratory of Electronics, and Department of Physics, Massachusetts Institute of Technology
Department of Physics, Research Laboratory of Electronics, Lincoln Laboratory, Massachusetts institute of Technology