Nanostructured electron beam deposited resonator combined with nanoparticles for mechanical single-electron transport

We present an integrated approach to build nano- electromechanical systems for single electron transport devices. By combining electron beam lithography with nanoparticles and direct three-dimensional electron-beam induced carbon growth, we have developed a scheme for fabricating an electromechanical single-electron transistor (emSET) for ultra-high frequencies. This process commands a size reduction of the metallic island and an improvement of the mechanical forces involved. We demonstrate how to combine two fabrication techniques for the realization of NEMS-SET devices. This will finally leads to Coulomb blockade effects and mechanical resonances in the GHz range.