Focus Session: Interfaces, Characterization, and Fabrication

Presentations

• Combined Surface Analytical Methods to Characterize Degradative Processes in Anti-Stiction Films in MEMS Devices

  COFFEE_KLATCH · Invited

  March 24, 2005, 5:00 AM – March 24, 2005, 5:36 AM

  Authors

  • Kevin Zavadil

    • Sandia National Laboratories

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• Role of interface in nanocrystalline diamond film internal friction

  ORAL

  March 24, 2005, 5:36 AM – March 24, 2005, 5:48 AM

  Authors

  • Thomas Metcalf

  • Xiao Liu

  • Brian Houston

  • James Butler

    • Naval Research Laboratory

  • Tatyana Feygelson

    • GeoCenters, Inc.

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• TEM-STM for Novel Nanotechnological Experimentation

  ORAL

  March 24, 2005, 5:48 AM – March 24, 2005, 6:00 AM

  Authors

  • Joel Vaughn

  • Martin-E. Kordesch

  • Saw-Wai Hla

    • Nanoscale \& Quantum Phenomena Institute, Physics \& Astronomy Dept., Ohio University, Athens, OH 45701
    • Nanoscale \& Quantum Phenomena Institute, Physics \& Astronomy Dept., Ohio University, Athens, OH 45701.
    • Physics \& Astronomy Dept., Ohio University, Athens, OH 45701
    • Quantitative Biology Institute, Physics \& Astronomy Dept., Ohio University, Athens, OH 45701
    • Condensed Matter and Surface Science Program at Ohio University, Department of Physics and Astronomy, Ohio University, Athens, OH-45701, USA

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• Photoacoustic Characterization of Nanoelectromechanical Systems

  ORAL

  March 24, 2005, 6:00 AM – March 24, 2005, 6:12 AM

  Authors

  • A. Kumar

  • O. Balogun

  • T. Kouh

  • Kamil Ekinci

  • T.W. Murray

    • Aerospace and Mechanical Eng. Dept., Boston University

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• Observation of the skin-depth effect on the Casimir force between metallic surfaces

  ORAL

  March 24, 2005, 6:12 AM – March 24, 2005, 6:24 AM

  Authors

  • Mariangela Lisanti

    • Harvard University, Department of Physics

  • Davide Iannuzzi

    • Harvard University, Division of Engineering and Applied Sciences

  • Federico Capasso

    • Harvard University, Division of Engineering and Applied Sciences

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• On the torque on birefringent plates induced by quantum fluctuations

  ORAL

  March 24, 2005, 6:24 AM – March 24, 2005, 6:36 AM

  Authors

  • Jeremy Munday

    • Harvard University
    • Harvard University, Department of Physics, Cambridge, MA 02138

  • Davide Iannuzzi

  • Federico Capasso

    • Harvard University, Division of Engineering and Applied Sciences, Cambridge, MA 02138

  • Yuri Barash

    • Institute of Solid State Physics, Russian Academy of Sciences, Moscow, reg. 142432, Russia

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• Nonlinear dynamics of micro-opto-mechanical cavities

  ORAL

  March 24, 2005, 6:36 AM – March 24, 2005, 6:48 AM

  Authors

  • Florian Marquardt

    • Departments of Physics and Applied Physics, Yale University, PO BOX 208284, New Haven, CT 06520, USA

  • Jack Harris

  • Steven Girvin

    • Yale University
    • Departments of Physics and Applied Physics, Yale University, PO BOX 208284, New Haven, CT 06520, USA
    • Department of Physics, Yale University

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• Novel Method for Gas Sampling Nanoliter MEMS Packages to Determine Hermeticity

  COFFEE_KLATCH · Invited

  March 24, 2005, 6:48 AM – March 24, 2005, 7:24 AM

  Authors

  • Steven Thornberg

    • Sandia National Laboratories

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• Bottom-up Fabrication of Nanoelectromechanical Systems by Two-layer Nanoimprint Lithography

  ORAL

  March 24, 2005, 7:24 AM – March 24, 2005, 7:36 AM

  Authors

  • Chien-Chih Huang

    • Dept. of Electrical and Computer Engineering, Boston University

  • Taejoon Kouh

  • Kamil L. Ekinci

    • Aerospace and Mechanical Engineering Dept., Boston University
    • Dept. of Aerospace and Mechanical Engineering, Boston University

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• Piezoelectric Aluminum Nitride Thin Films Deposited onto Metal Layer for Micromachined Ultrasonic Transducers

  ORAL

  March 24, 2005, 7:36 AM – March 24, 2005, 7:48 AM

  Authors

  • Changhe Huang

  • Ratna Naik

  • Gregory W. Auner

  • Qianghua Wang

  • Jianzeng Xu

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• Nanostructured electron beam deposited resonator combined with nanoparticles for mechanical single-electron transport

  ORAL

  March 24, 2005, 7:48 AM – March 24, 2005, 8:00 AM

  Authors

  • Hyun Kim

  • Hua Qin

  • Robert Blick

    • Laboratory for Molecular Scale Engineering, Electrical and Computer Engineering, University of Wisconsin-Madison

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