Production of reactive species in capacitively coupled hydrogen plasmas

ORAL

Abstract

Non-equilibrium plasmas that contain hydrogen are of significant interest for basic plasma physics and applications including plasma-enabled materials processing. Obtaining enhanced control of the spatially resolved production of reactive species, including atomic hydrogen, is critical. In this study, we investigate H-atom production in radio-frequency (rf) driven capacitively coupled hydrogen plasmas operating at low pressure. Two-photon absorption laser induced fluorescence measurements are applied to determine the spatially resolved density of atomic hydrogen. These are compared with rf-phase-resolved optical emission spectroscopy and 2D fluid-kinetic simulations to investigate the link between the rf-power deposition and processes that contribute to H-atom production and loss.

*We acknowledge financial support from EPSRC (EP/L01663X/1 and EP/S022430/1) and the Lam Research Corporation and are grateful to Andrew Malcolm-Neal and Matthew Hill for their technical support. The participation of Mark Kushner was supported by the US National Science Foundation and the US Department of Energy's Office of Fusion Energy Science.

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Presenters

  • James P Dedrick

    • University of York

Authors

  • James P Dedrick

    • University of York

  • Ryan Magee

    • University of York
    • York Plasma Institute, School of Physics, Engineering and Technology, University of York

  • Maximilian Kellermann-Stunt

    • University of York,
    • York Plasma Institute, University of York,

  • Shaun Smith

    • Lam Research Corporation

  • Chad Beaudette

    • Lam Research Corporation

  • Kari Niemi

    • University of York

  • Michael Mo

    • University of York

  • Gregory J Smith

    • University of Antwerp

  • Andrew R Gibson

    • University of York
    • York Plasma Institute, School of Physics, Engineering and Technology, University of York
    • York Plasma Institute, School of Physics, Engineering and Technology, University of York, United Kingdom
    • Ruhr University Bochum

  • Mark J Kushner

    • University of Michigan

  • Erik Wagenaars

    • University of York

  • Timo Gans

    • Dublin City University