Capacitively Coupled Plasmas I
ORAL · IT2 · ID: 3429985
Presentations
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Experimental Investigation of Hysteresis Effects in Capacitively Coupled Radio-Frequency Plasmas Operated in CF<sub>4</sub>
ORAL
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Presenters
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Florian Beckfeld
- Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany
- Ruhr University Bochum
Authors
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Florian Beckfeld
- Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany
- Ruhr University Bochum
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Maximilian Ryppa
- Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany
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Ihor Korolov
- Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany
- Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Germany
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Julian Schulze
- Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany
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Production of reactive species in capacitively coupled hydrogen plasmas
ORAL
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Presenters
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James P Dedrick
- University of York
Authors
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James P Dedrick
- University of York
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Ryan Magee
- University of York
- York Plasma Institute, School of Physics, Engineering and Technology, University of York
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Maximilian Kellermann-Stunt
- University of York,
- York Plasma Institute, University of York,
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Shaun Smith
- Lam Research Corporation
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Chad Beaudette
- Lam Research Corporation
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Kari Niemi
- University of York
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Michael Mo
- University of York
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Gregory J Smith
- University of Antwerp
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Andrew R Gibson
- University of York
- York Plasma Institute, School of Physics, Engineering and Technology, University of York
- York Plasma Institute, School of Physics, Engineering and Technology, University of York, United Kingdom
- Ruhr University Bochum
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Mark J Kushner
- University of Michigan
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Erik Wagenaars
- University of York
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Timo Gans
- Dublin City University
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3D Optical Emission Tomography of a Capacitively Coupled Plasma: Technique and Scientific Rational
ORAL
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Presenters
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Hyunseung Lee
- Korean Advanced Institute of Science and Technology (KAIST)
- KAIST
Authors
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Hyunseung Lee
- Korean Advanced Institute of Science and Technology (KAIST)
- KAIST
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jiwon CHOI
- Korea Advanced Institute of Science and Technology (KAIST)
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Jeonghun Ko
- Korea Advanced Institute of Science and Technology (KAIST)
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Sanghoo Park
- Korea Adv Inst of Sci & Tech
- Korea Advanced Institute of Science and Technology (KAIST)
- Korean Advanced Institute of Science and Technology (KAIST)
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Machine Learning for Fast Prediction of Ion Velocity Distribution Functions in Capacitively Coupled Plasmas and for Acceleration of Particle-In-Cell Simulations
ORAL
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Publication: A. T. Powis, D. C. Rivera, A. Khrabry, I. D. Kaganovich, "Accelerating multi-time-scale simulations with neural-network generated initial conditions", submitted to the 54th International Conference on Parallel Processing
Presenters
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Andrew Tasman Powis
- Princeton Plasma Physics Laboratory, Princeton, USA
Authors
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Andrew Tasman Powis
- Princeton Plasma Physics Laboratory, Princeton, USA
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Domenica Corona
- Princeton Plasma Physics Laboratory
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Alexander Khrabry
- Lawrence Livermore National Laboratory
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Alexander V. Khrabrov
- Princeton Plasma Physics Laboratory (PPPL)
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Igor D Kaganovich
- Princeton Plasma Physics Laboratory (PPPL)
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Reconstructing EEDFs from Emission Spectra in Capacitively Coupled Plasmas via Neural Networks Trained on PIC-CR Simulations
ORAL
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Presenters
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Zeduan Zhang
- Beijing Institute of Technology
Authors
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Zeduan Zhang
- Beijing Institute of Technology
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Zeduan Zhang
- Beijing Institute of Technology
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Jianxiong Yao
- Beijing Institute of Technology
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Bocong Zheng
- Beijing Institute of Technology
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Electrical asymmetry reversal induced by fundamental excitation frequency in capacitively coupled plasmas driven by tailored voltage waveforms
ORAL
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Presenters
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Kai Zhao
- Dalian University of Technology
Authors
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Kai Zhao
- Dalian University of Technology
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Yang Zhou
- Dalian university of technology
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You-Nian Wang
- Dalian university of technology
- Dalian University of Technology
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