Diamond Like Carbon Deposition

Presentations

• Effect of pulse width on deposition of diamond-like carbon on high power pulsed magnetron sputtering

  ORAL

  Oct. 6, 2022, 4:00 PM – Oct. 6, 2022, 4:15 PM

  Publication: K. Iga et al., Thin Solid Films 672(2019) 104.

  Presenters

  • Takayuki Ohta

    • Meijo Univ
    • Meijo University, Shiogamaguchi 1-501, Tenpaku-ku, Nagoya 468-8502, Japan.
    • Department of Electrical and Electronic Engineering, Meijo University, Japan
    • Department of Electrical and Electronic Engineering, Meijo University, Japan.
    • Meijo university
    • Meijo University
    • Department of Electrical and Electronic Engineering, Meijo Universiry, Japan

  Authors

  • Takayuki Ohta

    • Meijo Univ
    • Meijo University, Shiogamaguchi 1-501, Tenpaku-ku, Nagoya 468-8502, Japan.
    • Department of Electrical and Electronic Engineering, Meijo University, Japan
    • Department of Electrical and Electronic Engineering, Meijo University, Japan.
    • Meijo university
    • Meijo University
    • Department of Electrical and Electronic Engineering, Meijo Universiry, Japan

  • Jo Matsushima

    • Meijo university

  • Sota Okumura

    • Meijo University, Shiogamaguchi 1-501, Tenpaku-ku, Nagoya 468-8502, Japan.
    • Meijo university

  • Akinori Oda

    • Chiba Inst of Tech
    • Chiba Institute of Technology, Tsudanuma 2-17-1, Narashino 275-0016, Japan.
    • Department of Electrical and Electronic Engineering, Chiba Institute of Technology, Japan
    • Department of Electrical and Electronic Engineering, Chiba Institute of Technology, Japan.
    • Chiba Institute of Technology

  • Hiroyuki Kousaka

    • Gifu University, Yanagido 1-1, Gifu 501-1193, Japan.
    • Department of Mechanical Engineering, Gifu University, Japan
    • Department of Mechanical Engineering, Gifu University, Japan.
    • Gifu University

  View abstract →

• Gas phase diagnostics on high power pulsed magnetron sputtering using double-pulse target-voltage

  ORAL

  Oct. 6, 2022, 4:15 PM – Oct. 6, 2022, 4:30 PM

  Publication: K. Iga et al., Thin Solid Films 672(2019) 104.

  Presenters

  • Hiro Kunieda

    • Department of Electrical and Electronic Engineering, Meijo University, Japan.

  Authors

  • Hiro Kunieda

    • Department of Electrical and Electronic Engineering, Meijo University, Japan.

  • Akinori Oda

    • Chiba Inst of Tech
    • Chiba Institute of Technology, Tsudanuma 2-17-1, Narashino 275-0016, Japan.
    • Department of Electrical and Electronic Engineering, Chiba Institute of Technology, Japan
    • Department of Electrical and Electronic Engineering, Chiba Institute of Technology, Japan.
    • Chiba Institute of Technology

  • Hiroyuki Kousaka

    • Gifu University, Yanagido 1-1, Gifu 501-1193, Japan.
    • Department of Mechanical Engineering, Gifu University, Japan
    • Department of Mechanical Engineering, Gifu University, Japan.
    • Gifu University

  • Takayuki Ohta

    • Meijo Univ
    • Meijo University, Shiogamaguchi 1-501, Tenpaku-ku, Nagoya 468-8502, Japan.
    • Department of Electrical and Electronic Engineering, Meijo University, Japan
    • Department of Electrical and Electronic Engineering, Meijo University, Japan.
    • Meijo university
    • Meijo University
    • Department of Electrical and Electronic Engineering, Meijo Universiry, Japan

  View abstract →

• Effect of xenon gas on deposition of diamond-like carbon film using high power pulsed magnetron sputtering

  ORAL

  Oct. 6, 2022, 4:30 PM – Oct. 6, 2022, 4:45 PM

  Publication: K. Iga et al., Thin Solid Films 672(2019) 104.

  Presenters

  • Keita Takeda

    • Department of Electrical and Electronic Engineering, Meijo University, Japan

  Authors

  • Keita Takeda

    • Department of Electrical and Electronic Engineering, Meijo University, Japan

  • Akinori Oda

    • Chiba Inst of Tech
    • Chiba Institute of Technology, Tsudanuma 2-17-1, Narashino 275-0016, Japan.
    • Department of Electrical and Electronic Engineering, Chiba Institute of Technology, Japan
    • Department of Electrical and Electronic Engineering, Chiba Institute of Technology, Japan.
    • Chiba Institute of Technology

  • Hiroyuki Kousaka

    • Gifu University, Yanagido 1-1, Gifu 501-1193, Japan.
    • Department of Mechanical Engineering, Gifu University, Japan
    • Department of Mechanical Engineering, Gifu University, Japan.
    • Gifu University

  • Takayuki Ohta

    • Meijo Univ
    • Meijo University, Shiogamaguchi 1-501, Tenpaku-ku, Nagoya 468-8502, Japan.
    • Department of Electrical and Electronic Engineering, Meijo University, Japan
    • Department of Electrical and Electronic Engineering, Meijo University, Japan.
    • Meijo university
    • Meijo University
    • Department of Electrical and Electronic Engineering, Meijo Universiry, Japan

  View abstract →

• Deposition of hydrogenated diamond-like carbon using high power impulse magnetron sputtering

  ORAL

  Oct. 6, 2022, 4:45 PM – Oct. 6, 2022, 5:00 PM

  Publication: K. Iga et al., Thin Solid Films 672(2019) 104.

  Presenters

  • Sota Okumura

    • Meijo University, Shiogamaguchi 1-501, Tenpaku-ku, Nagoya 468-8502, Japan.
    • Meijo university

  Authors

  • Sota Okumura

    • Meijo University, Shiogamaguchi 1-501, Tenpaku-ku, Nagoya 468-8502, Japan.
    • Meijo university

  • Akinori Oda

    • Chiba Inst of Tech
    • Chiba Institute of Technology, Tsudanuma 2-17-1, Narashino 275-0016, Japan.
    • Department of Electrical and Electronic Engineering, Chiba Institute of Technology, Japan
    • Department of Electrical and Electronic Engineering, Chiba Institute of Technology, Japan.
    • Chiba Institute of Technology

  • Hiroyuki Kousaka

    • Gifu University, Yanagido 1-1, Gifu 501-1193, Japan.
    • Department of Mechanical Engineering, Gifu University, Japan
    • Department of Mechanical Engineering, Gifu University, Japan.
    • Gifu University

  • Takayuki Ohta

    • Meijo Univ
    • Meijo University, Shiogamaguchi 1-501, Tenpaku-ku, Nagoya 468-8502, Japan.
    • Department of Electrical and Electronic Engineering, Meijo University, Japan
    • Department of Electrical and Electronic Engineering, Meijo University, Japan.
    • Meijo university
    • Meijo University
    • Department of Electrical and Electronic Engineering, Meijo Universiry, Japan

  View abstract →

• Optimization of hexagonal boron nitride deposition by micro hollow cathode discharge

  ORAL

  Oct. 6, 2022, 5:00 PM – Oct. 6, 2022, 5:15 PM

  Publication: A. Remigy et al. " Cross-comparison of diagnostic and 0D modeling of a micro-hollow cathode discharge in the stationary regime in an Ar/N2 gas mixture". J. Phys. D: Appl. Phys. 55 (2022) 105202
  H. Kabbara et al. "A microplasma process for hexagonal boron nitride thin film synthesis". Appl. Phys. Lett. 116 (2020) 171902

  Presenters

  • Claudia Lazzaroni

    • LSPM CNRS UPR3407

  Authors

  • Claudia Lazzaroni

    • LSPM CNRS UPR3407

  • Alice Remigy

    • LSPM CNRS UPR3407

  • Manoel Jacquemin

    • LSPM CNRS UPR3407

  • Vianney Mille

    • LSPM CNRS UPR3407

  • Ovidiu Brinza

    • LSPM CNRS UPR3407

  • Xavier Aubert

    • LSPM CNRS UPR3407

  • Swaminathan Prasanna

    • LSPM CNRS UPR3407

  • Kristaq Gazeli

    • LSPM CNRS UPR3407

  • Guillaume Lombardi

    • LSPM CNRS UPR3407

  View abstract →

• Evaluation of carbon bonding of DLC films using HF-HiPIMS method by Raman spectroscopy

  ORAL

  Oct. 6, 2022, 5:15 PM – Oct. 6, 2022, 5:30 PM

  Publication: S. Takabayashi, K. Okamoto, Y. Takakuwa and T. Nakatani, Surf. Coat. Technol. 330, 26 (2017).

  Presenters

  • Hiroyuki Fukue

    • Okayama University of Science

  Authors

  • Hiroyuki Fukue

    • Okayama University of Science

  • Tatsuyuki Nakatani

    • Okayama University of Science

  • Tadayuki Okano

    • Tokyo Electronics Co., Ltd.

  • Masahide Kuroiwa

    • Tokyo Electronics Co., Ltd.

  • Shinsuke Kunitsugu

    • Industrial Technology Center of Okayama Prefecture

  • Hiroki Oota

    • Kenix Corporation

  • Hiroki Oota

    • Kenix Corporation

  View abstract →

• Single Crystal Diamond Growth by High-Flow Ar/CH₄/H₂ Modulated Induction Meso-Plasmas at Reduced Pressures

  ORAL

  Oct. 6, 2022, 5:30 PM – Oct. 6, 2022, 5:45 PM

  Presenters

  • Taizo Higashi

    • Kanazawa University

  Authors

  • Taizo Higashi

    • Kanazawa University

  • Yasunori Tanaka

    • Kanazawa University

  • Tatsuo Ishijima

    • Kanazawa Univarsity
    • Kanazawa University

  • Yusuke Nakano

    • Kanazawa Univarsity
    • Kanazawa University

  View abstract →

• Deposition mechanism of hydrogenated amorphous carbon film by C₃H₆/H₂ mixture gas plasma

  ORAL

  Oct. 6, 2022, 5:45 PM – Oct. 6, 2022, 6:00 PM

  Presenters

  • Hiroki Kondo

    • Nagoya Univ
    • Nagoya University, Japan

  Authors

  • Hiroki Kondo

    • Nagoya Univ
    • Nagoya University, Japan

  • Jumpei Kurokawa

    • Nagoya University

  • Takayoshi Tsutsumi

    • Nagoya University
    • Nagoya Univ

  • Makoto Sekine

    • Nagoya University
    • Nagoya Univ

  • Kenji Ishikawa

    • Nagoya Univ
    • Nagoya University
    • Nagoya University, Japan

  • Masaru Hori

    • Nagoya Univ
    • Nagoya University
    • Center for Low-temperature Plasma Sciences, Nagoya University, Chikusa-ku, Nagoya 464-8603, Japan.

  View abstract →