Modeling - Plasma Processing and Chemistry I

ORAL · FW1 · ID: 547501

Presentations

  • ORAL

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    Presenters

    • Willca Villafana

      • Princeton Plasma Physics Laboratory
      • Prince Plasma Physics Laboratory

    Authors

    • Shahid Rauf

      • Applied Materials Inc, USA
      • Applied Materials Inc
      • Applied Materials
      • Applied Materials Inc.

    • Dmytro Sydorenko

      • University of Alberta

    • Sierra E Jubin

      • Princeton University

    • Willca Villafana

      • Princeton Plasma Physics Laboratory
      • Prince Plasma Physics Laboratory

    • Stephane A Ethier

      • Princeton Plasma Physics Laboratory

    • Alexander V Khrabrov

      • Princeton Plasma Physics Laboratory

    • Igor D Kaganovich

      • Princeton Plasma Physics Laboratory, Princeton University, USA
      • Princeton Plasma Physics Laboratory

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  • ORAL

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    Presenters

    • Michel Osca Engelbrecht

      • York Plasma Institute, Department of Physics, University of York, UK

    Authors

    • Michel Osca Engelbrecht

      • York Plasma Institute, Department of Physics, University of York, UK

    • Christopher P Ridgers

      • York Plasma Institute, Department of Physics, University of York, UK

    • Andrew R Gibson

      • Research Group for Biomedical Plasma Technology, Faculty of Electrical Engineering and Information Sciences, Ruhr University Bochum, Bochum, Germany.
      • 1) Research Group for Biomedical Plasma Technology, Ruhr-Universität Bochum, Germany; 2) Institute for Electrical Engineering and Plasma Technology, Ruhr-Universität Bochum, Germ
      • Research Group for Biomedical Plasma Technology, Ruhr-University Bochum, Universitätsstraße 150 D-44801 Bo­chum, Germany
      • Ruhr University Bochum, Germany
      • Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany
      • Ruhr University Bochum

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  • ORAL

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    Presenters

    • Iori Nagao

      • Kyushu University

    Authors

    • Iori Nagao

      • Kyushu University

    • Akihiro Yamamoto

      • Kyushu University

    • Yuma Yamamoto

      • Kyushu University

    • Kunihiro Kamataki

      • Kyushu Univ
      • Kyushu University
      • Kyushu University, Japan

    • Takamasa Okumura

      • Kyushu University
      • Kyushu University, Japan

    • Naoto Yamashita

      • Kyushu University
      • Kyushu University, Japan

    • Naho Itagaki

      • Kyushu University

    • Kazunori Koga

      • Kyushu Univ
      • Kyushu University
      • Kyushu University, Japan

    • Masaharu Shiratani

      • Kyushu University
      • Kyushu University, Japan

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  • ORAL

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    Publication: planned paper: plasma species and reaction dynamic-oriented global model studies for microscale argon discharges

    Presenters

    • De-Qi Wen

      • Michigan State University

    Authors

    • De-Qi Wen

      • Michigan State University

    • Peng Zhang

      • Michigan State University

    • You-Nian Wang

      • Dalian University of Technology
      • Dalian University of Technolpgy
      • Dalian University of Technology, China

    • John P. Verboncoeur

      • Michigan State University
      • Department of Electrical and Computer Engineering, Michigan State University

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