Modeling of Plasma Sources

Presentations

• RF Hollow Cathode Discharge Characterization using PIC-MCC Simulation and Reduced Order Model Development

  ORAL · Invited

  Oct. 7, 2021, 4:00 PM – Oct. 7, 2021, 4:30 PM

  Presenters

  • Kallol Bera

    • Applied Materials Inc.
    • Applied Materials Inc

  Authors

  • Kallol Bera

    • Applied Materials Inc.
    • Applied Materials Inc

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• Particle-in-cell simulation of multi-frequency capacitively-coupled plasmas at low pressure: a 2D perspective in Ar and O2

  ORAL

  Oct. 7, 2021, 4:30 PM – Oct. 7, 2021, 4:45 PM

  Presenters

  • Peng Tian

    • Applied Materials Inc

  Authors

  • Peng Tian

    • Applied Materials Inc

  • Han Luo

    • Applied Materials Inc

  • Jason Kenney

    • Applied Materials
    • Applied Materials Inc

  • Shahid Rauf

    • Applied Materials Inc

  • Julian Schulze

    • University of Bochum, Germany
    • Ruhr-Universität Bochum, Germany
    • Ruhr Univ Bochum
    • Bochum University
    • Ruhr University Bochum & Dalian University of Technology
    • Ruhr University Bochum, 44780 Bochum, Germany
    • Ruhr University Bochum
    • Ruhr University Bochum and Dalian University of Technology
    • Ruhr-University Bochum, Germany; Dalian University of Technology, China

  • Ihor Korolov

    • Ruhr Univ Bochum
    • Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany
    • Ruhr-Universität Bochum, Germany
    • Ruhr University Bochum
    • Bochum University
    • Ruhr Univ Bochum, Germany
    • Ruhr-University Bochum
    • Ruhr-University Bochum, Germany

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• Development of a radial-axial particle-in-cell Monte Carlo collision model for capacitively coupled plasmas

  ORAL

  Oct. 7, 2021, 4:45 PM – Oct. 7, 2021, 5:00 PM

  Presenters

  • Kentaro Hara

    • Stanford University
    • Stanford Univ

  Authors

  • Kentaro Hara

    • Stanford University
    • Stanford Univ

  • Raymond Lau

    • Stanford University
    • Stanford Univ

  • Jason Kenney

    • Applied Materials
    • Applied Materials Inc

  • Shahid Rauf

    • Applied Materials Inc

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• 3-D Modeling Study of Remote Microwave NH3/N2 Plasma for Wafer Native Oxide Cleaning Process

  ORAL

  Oct. 7, 2021, 5:00 PM – Oct. 7, 2021, 5:15 PM

  Publication: Barberena Valencia, J.P., Raja, L.L., Upadhyay, R. & Ryu, S.M. (2021). 3-D Modeling Study of Remote Microwave NH3/N2 Plasma for Wafer Native Oxide Cleaning Process. (Paper in Progress)

  Presenters

  • Juan P Barberena Valencia

    • University of Texas at Austin

  Authors

  • Juan P Barberena Valencia

    • University of Texas at Austin

  • Laxminarayan L Raja

    • University of Texas at Austin
    • The University of Texas at Austin

  • Rochan Upadhyay

    • Esgee Technologies

  • Seung-Min Ryu

    • University of Texas at Austin

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• Computational study of current-voltage characteristics of a dc atmospheric pressure glow discharge using a 3D model

  ORAL

  Oct. 7, 2021, 5:15 PM – Oct. 7, 2021, 5:30 PM

  Presenters

  • Valentin Boutrouche

    • University of Massachusetts Lowell

  Authors

  • Valentin Boutrouche

    • University of Massachusetts Lowell

  • Juan Trelles

    • University of Massachusetts Lowell

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• Electron dynamics in radio-frequency driven micro atmospheric plasma jets for CO2 conversion

  ORAL

  Oct. 7, 2021, 5:30 PM – Oct. 7, 2021, 5:45 PM

  Presenters

  • Sebastian Wilczek

    • Ruhr University Bochum
    • Ruhr-University Bochum, Germany
    • Ruhr University, Bochum, Germany

  Authors

  • Sebastian Wilczek

    • Ruhr University Bochum
    • Ruhr-University Bochum, Germany
    • Ruhr University, Bochum, Germany

  • Yue Liu

    • Ruhr University Bochum
    • Ruhr-University Bochum, Germany

  • Natalia Y Babaeva

    • Joint Institute for High Temperature, RAS
    • Joint Institute for High Temperatures, Moscow, Russia

  • George V Naidis

    • Joint Institute for High Temperature, RAS
    • Joint Institute for High Temperatures, Moscow, Russia

  • Thomas Mussenbrock

    • Ruhr University Bochum
    • Bochum University
    • Ruhr Univ Bochum
    • Ruhr-University Bochum, Germany
    • Ruhr-University Bochum
    • Ruhr University Bochum, 44780 Bochum, Germany
    • Ruhr University, Bochum, Germany

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• 3-dimensional semi-analytic model of a microwave driven miniature plasma jet

  ORAL

  Oct. 7, 2021, 5:45 PM – Oct. 7, 2021, 6:00 PM

  Presenters

  • Michael Klute

    • Ruhr-University Bochum

  Authors

  • Michael Klute

    • Ruhr-University Bochum

  • Efe Kemaneci

    • Ruhr-University Bochum
    • Ruhr Univ Bochum
    • Institute of Theoretical Electrical Engineering, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany

  • Horia-Eugen Porteanu

    • Microwave Department, Ferdinand-Braun-Institut, Berlin, Germany

  • Ilija Stefanovic

    • Institute of Technical Sciences, Serbian Academy of Sciences and Arts, Belgrade, Serbia

  • Wolfgang Heinrich

    • Microwave Department, Ferdinand-Braun-Institut, Berlin, Germany

  • Peter Awakowicz

    • Ruhr-University Bochum
    • Ruhr University Bochum
    • Ruhr Univ Bochum
    • Ruhr-University Bochum, Germany

  • Ralf Peter Brinkmann

    • Ruhr Univ Bochum
    • Ruhr University Bochum

  View abstract →