Principles and some progress in floating probe method (FPM) for process plasma diagnostics and monitoring

Floating probe method (FPM) applicable to process plasma has recently been developed. Recent progress and variant methods based on these FPM are introduced. A method of measuring plasma wirelessly by modifying the FPM has been developed, and plasma densities and electron temperatures were measured considering the deposition of the probe surface. This technique will be applicable to process plasma diagnosis and monitoring.