Study the excitation of high frequency waves and its effect on plasma properties in weakly magnetized capacitive discharge

Sarveshwar Sharma; Shali Yang; Alexander V. Khrabrov; Igor Kaganovich; Wei Jiang

Study the excitation of high frequency waves and its effect on plasma properties in weakly magnetized capacitive discharge

ORAL

Abstract

In recent publication [Phys. Plasmas 25, 080704 (2018)] it is reported that the spatial symmetry in low pressure single frequency capacitively coupled plasmas (SF-CCP) can be break by using transverse magnetic field. It is also shown that the flux and energy of ions can be controlled simultaneously by changing the sheath width with help of transverse magnetic field. In present work, we report the numerical evidence of the excitation of the high frequency waves and its effect on electron heating in low-pressure CCP. The detailed study of the effect of these waves on the bulk plasma properties and heating mechanism of electrons and ions are studied here using direct implicit particle in cell (PIC) simulation.

Oct. 31, 2019, 5:15 PM – Oct. 31, 2019, 5:30 PM

Authors

Sarveshwar Sharma
- Institute for Plasma Research, Bhat, Gandhinagar 382 428, India
- Institute for Plasma Research, Gandhinagar, India
Shali Yang
- School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China
Alexander V. Khrabrov
- Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA
Igor Kaganovich
- Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA
Wei Jiang
- School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China