Capacitively Coupled Plasmas II

Presentations

• Investigation on the plasma uniformity of a capacitively coupled plasma reactor using a two-dimensional GPU-based particle-in-cell simulation

  COFFEE_KLATCH · Invited

  Oct. 31, 2019, 4:00 PM – Oct. 31, 2019, 4:30 PM

  Authors

  • Hae June Lee

    • Pusan National University
    • Department of Electrical & Computer Engineering, Pusan National University, Busan

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• A novel large-area sputtering process with tunable coating properties in multi-frequency capacitively coupled plasmas based on the Electrical Asymmetry Effect

  ORAL

  Oct. 31, 2019, 4:30 PM – Oct. 31, 2019, 4:45 PM

  Authors

  • David Schulenberg

    • Ruhr-University Bochum

  • Stefan Ries

    • Ruhr-University Bochum

  • Peter Awakowicz

    • Ruhr-University Bochum
    • Institute of Electrical Engineering and Plasma Technology, Ruhr University Bochum

  • Julian Schulze

    • Ruhr-University Bochum
    • Ruhr-University Bochum, Germany
    • 2Department of Electrical Engineering, Ruhr University Bochum, Bochum, Germany
    • Ruhr University Bochum, Germany, West Virginia University, USA
    • West Virginia University, Ruhr University Bochum
    • Ruhr University Bochum, Germany

  • Lars Banko

    • Ruhr-University Bochum

  • Alfred Ludwig

    • Ruhr-University Bochum

  • Daniel Primetzhofer

    • Uppsala University

  • Marcus Hans

    • RWTH Aachen University

  • Jochen M. Schneider

    • RWTH Aachen University

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• Observation of electron series resonance in transversely magnetized 13.56 MHz CCP discharge

  ORAL

  Oct. 31, 2019, 4:45 PM – Oct. 31, 2019, 5:00 PM

  Authors

  • Jay Joshi

    • Institute for Plasma Research, HBNI

  • Shikha Binwal

    • Jamia Millia Islamia (A central university)
    • Jamia Millia Islamia (A Central University), New Delhi, India

  • Shantanu Kumar Karkari

    • Institute for Plasma Research, HBNI, Bhat, Gandhinagar 382428, India
    • Institute for Plasma Research, HBNI
    • Institute for Plasma Research, HBNI, Gandhinagar, Gujarat, India

  • Sunil Kumar

    • Institute for Plasma Research, HBNI, Bhat, Gandhinagar 382428, India
    • Institute for Plasma Research, HBNI

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• Investigation of Variable Excitation Frequency Capacitively Coupled Plasmas at Probing Frequencies up to 3 GHz

  ORAL

  Oct. 31, 2019, 5:00 PM – Oct. 31, 2019, 5:15 PM

  Authors

  • Andrei Khomenko

    • Purdue University

  • Taehwan Seo

    • Purdue University

  • Sergey Macheret

    • Purdue University

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• Study the excitation of high frequency waves and its effect on plasma properties in weakly magnetized capacitive discharge

  ORAL

  Oct. 31, 2019, 5:15 PM – Oct. 31, 2019, 5:30 PM

  Authors

  • Sarveshwar Sharma

    • Institute for Plasma Research, Bhat, Gandhinagar 382 428, India
    • Institute for Plasma Research, Gandhinagar, India

  • Shali Yang

    • School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China

  • Alexander V. Khrabrov

    • Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA

  • Igor Kaganovich

    • Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA

  • Wei Jiang

    • School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China

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• Validation Studies using ELK and the Open Source MOOSE Framework Application Zapdos for Electromagnetic Coupled Plasma Simulation

  ORAL

  Oct. 31, 2019, 5:30 PM – Oct. 31, 2019, 5:45 PM

  Authors

  • Casey Icenhour

    • North Carolina State University

  • Corey DeChant

    • North Carolina State University

  • Alexander Lindsay

    • Idaho National Laboratory

  • Richard Martineau

    • Idaho National Laboratory

  • David Green

    • Oak Ridge National Laboratory

  • Steven Shannon

    • North Carolina State University

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