Inductively Coupled Plasmas II

Presentations

• Simulating industrial plasma reactors - A fresh perspective

  ORAL

  Oct. 13, 2016, 2:00 PM – Oct. 13, 2016, 2:15 PM

  Authors

  • Sebastian Mohr

    • Quantemol

  • Sara Rahimi

    • Quantemol

  • Jonathan Tennyson

    • University College London

  • Oliver Ansell

    • SPTS Technologies

  • Jash Patel

    • SPTS Technologies

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• A hybrid model of biased inductively coupled discharges$^{\mathrm{1}}$

  ORAL

  Oct. 13, 2016, 2:15 PM – Oct. 13, 2016, 2:30 PM

  Authors

  • Deqi Wen

    • Dalian University of Technology

  • Michael A Lieberman

    • Uniersity of California, Berkeley

  • Quanzhi Zhang

    • University of Anterwerp

  • Yong-Xin Liu

    • Dalian University of Technology
    • School of Physics and Optoelectronic Technology, Dalian University of Technology,
    • School of Physics and Optoelectronic Technology, Dalian University of Technology, China

  • You-Nian Wang

    • Dalian University of Technology
    • School of Physics and Optoelectronic Technology, Dalian University of Technology,
    • School of Physics and Optoelectronic Technology, Dalian University of Technology, China

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• Modeling of inductively coupled plasmas at low pressure conditions

  ORAL

  Oct. 13, 2016, 2:30 PM – Oct. 13, 2016, 2:45 PM

  Authors

  • Sotiris Mouchtouris

    • Institute of Nanoscience and Nanotechnology, NCSR Demokritos

  • George Kokkoris

    • Institute of Nanoscience and Nanotechnology, NCSR Demokritos

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• Structure Control of Vertical Nanographene toward Electrochemical and Bio Applications

  ORAL

  Oct. 13, 2016, 2:45 PM – Oct. 13, 2016, 3:00 PM

  Authors

  • Mineo Hiramatsu

    • Meijo University

  • Hiroki Kondo

    • Nagoya University

  • Masaru Hori

    • Nagoya University

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• Research on the mechanism of multiple inductively coupled plasma source for large area processing

  ORAL

  Oct. 13, 2016, 3:00 PM – Oct. 13, 2016, 3:15 PM

  Authors

  • JangJae Lee

    • Department of physics, Chungnam National University

  • SiJun Kim

    • Chungnam National University
    • Department of physics, Chungnam National University

  • Dae-Woong Kim

    • Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology
    • Physics, Chungnam national university

  • KwangKi Kim

    • Department of physics, Chungnam National University

  • YoungSeok Lee

    • Department of physics, Chungnam National University

  • ShinJae You

    • Department of physics, Chungnam National University

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• Synthesis of Silicon Nanoparticles in Inductively Coupled Plasmas

  ORAL

  Oct. 13, 2016, 3:15 PM – Oct. 13, 2016, 3:30 PM

  Authors

  • Aram H. Markosyan

    • University of Michigan

  • Romain Le Picard

    • University of Miinesota
    • University of Minnesota

  • Steven Girshick

    • University of Miinesota
    • University of Minnesota

  • Mark J. Kushner

    • University of Michigan
    • Electrical Engineering and Computer Science Dept., University of Michigan

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