Parametric investigations of striations in electronegative capacitively coupled radio-frequency plasmas

ORAL

Abstract

Striated structures in light emission have been observed by Phase Resolved Optical Emission Spectroscopy (PROES) and analyzed based on particle-based kinetic simulations in capacitively coupled rf CF4 plasmas. On this basis, we conduct a systematic study on the effects of external parameters on the striated structure by PROES and particle-based kinetic simulations. Our results exhibit that at 100 Pa pressure and 300 V voltage amplitude striations generally occur within a certain driving frequency range, i.e., between 2 MHz and 18 MHz, and the distance between the ion density maxima decreases with rising driving frequency. A mode discharge transition from the “drift-ambipolar” into “striation” mode could be observed by increasing the pressure or rf voltage. The reasons for these observations are further understood by the analytical solution of a simply model of the ion-ion plasma.

*This work has been supported by the National Natural Science Foundation of China (NSFC) (Grant Nos. 11335004 and 11405018).

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Authors

  • Yong-Xin Liu

    • Dalian University of Technology
    • School of Physics and Optoelectronic Technology, Dalian University of Technology,
    • School of Physics and Optoelectronic Technology, Dalian University of Technology, China

  • Edmund Schungel

    • Department of Physics, West Virginia University, Morgantown, USA

  • Ihor Korolov

    • Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary

  • Zoltan Donko

    • Institute for Solid State Physics and Optics, Budapest
    • Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Hungary
    • Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary

  • Julian Schulze

    • Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany

  • You-Nian Wang

    • Dalian University of Technology
    • School of Physics and Optoelectronic Technology, Dalian University of Technology,
    • School of Physics and Optoelectronic Technology, Dalian University of Technology, China