Capacitively Coupled Plasmas I

Presentations

• Influence of the normal modes on the plasma uniformity in large scale CCP reactors.

  ORAL

  Oct. 11, 2016, 4:00 PM – Oct. 11, 2016, 4:15 PM

  Authors

  • Denis Eremin

    • Ruhr University Bochum

  • Ralf Peter Brinkmann

    • Ruhr University Bochum
    • Institute of Theoretical Electrical Engineering, Ruhr-University Bochum
    • Institute of Theoretical Electrical Engineering, Ruhr-University Bochum,

  • Thomas Mussenbrock

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany
    • Ruhr University Bochum

  • Barton Lane

    • Tokyo Electron America
    • Tokyo Electron Ltd.

  • Masaaki Matsukuma

    • Tokyo Electron Limited
    • Tokyo Electron Ltd.

  • Peter Ventzek

    • Tokyo Electron Ltd.

  View abstract →

• Striations in electronegative capacitively coupled radio frequency plasmas

  ORAL

  Oct. 11, 2016, 4:15 PM – Oct. 11, 2016, 4:30 PM

  Authors

  • Julian Schulze

    • Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum
    • Institute for Electrical Engineering, Ruhr-University Bochum, Germany

  • Yong-Xin Liu

    • School of Physics, Dalian University of Technology, China

  • Edmund Schuengel

    • Department of Physics, West Virginia University, USA

  • Ihor Korolov

    • Hungarian Academy of Sciences

  • You-Nian Wang

    • School of Physics, Dalian University of Technology, China

  • Zoltan Donko

    • Hungarian Academy of Sciences

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• Parametric investigations of striations in electronegative capacitively coupled radio-frequency plasmas

  ORAL

  Oct. 11, 2016, 4:30 PM – Oct. 11, 2016, 4:45 PM

  Authors

  • Yong-Xin Liu

    • Dalian University of Technology
    • School of Physics and Optoelectronic Technology, Dalian University of Technology,
    • School of Physics and Optoelectronic Technology, Dalian University of Technology, China

  • Edmund Schungel

    • Department of Physics, West Virginia University, Morgantown, USA

  • Ihor Korolov

    • Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary

  • Zoltan Donko

    • Institute for Solid State Physics and Optics, Budapest
    • Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Hungary
    • Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary

  • Julian Schulze

    • Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany

  • You-Nian Wang

    • Dalian University of Technology
    • School of Physics and Optoelectronic Technology, Dalian University of Technology,
    • School of Physics and Optoelectronic Technology, Dalian University of Technology, China

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• Two Dimensional Particle-in-cell/Monte Carlo (PIC/MC) Simulation of Radio Frequency Capacitively Coupled Plasmas with a Dielectric Side Wall Boundary

  ORAL

  Oct. 11, 2016, 4:45 PM – Oct. 11, 2016, 5:00 PM

  Authors

  • Yue Liu

    • LPP, CNRS, Ecole Polytechnique-UPMC-UPSud-UPSay

  • Jean-Paul Booth

    • LPP, CNRS-Ecole Polytechnique-UPMC
    • Ecole Polytechnique
    • Laboratoire de Physique des Plasmas, Ecole Polytechnique
    • LPP, CNRS, Ecole Polytechnique-UPMC-UPSud-UPSay

  • Pascal Chabert

    • Ecole Polytechnique
    • LPP Ecole Polytechnique
    • LPP, CNRS, Ecole Polytechnique-UPMC-UPSud-UPSay

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• Virtual IED sensor at an rf-biased electrode in low-pressure plasma

  ORAL

  Oct. 11, 2016, 5:00 PM – Oct. 11, 2016, 5:15 PM

  Authors

  • Maria Bogdanova

    • Faculty of Physics, Moscow State University, MSU, Moscow Russia

  • Dmitry Lopaev

    • Skobeltsyn Institute of Nuclear Physics, Moscow State University, SINP MSU, Moscow Russia
    • Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State Univ, Russia

  • Sergey Zyryanov

    • Faculty of Physics, Moscow State University, MSU, Moscow Russia
    • Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State Univ. Russia

  • Alexander Rakhimov

    • Skobeltsyn Institute of Nuclear Physics, Moscow State University, SINP MSU, Moscow Russia

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• Precise measurements of neutral gas temperature using Fiber Bragg Grating sensor in Argon capacitively coupled plasmas

  ORAL

  Oct. 11, 2016, 5:15 PM – Oct. 11, 2016, 5:30 PM

  Authors

  • Daoman Han

    • School of Physics and Optoelectronic Technology, Dalian University of Technology,

  • Zigeng Liu

    • School of Physics and Optoelectronic Technology, Dalian University of Technology,

  • Yong-Xin Liu

    • Dalian University of Technology
    • School of Physics and Optoelectronic Technology, Dalian University of Technology,
    • School of Physics and Optoelectronic Technology, Dalian University of Technology, China

  • Wei Peng

    • School of Physics and Optoelectronic Technology, Dalian University of Technology,

  • You-Nian Wang

    • Dalian University of Technology
    • School of Physics and Optoelectronic Technology, Dalian University of Technology,
    • School of Physics and Optoelectronic Technology, Dalian University of Technology, China

  View abstract →