Inductively Coupled Plasmas I

Presentations

• Control of ion energy distributions in inductively coupled ratio-frequency plasmas with a biased electrode

  ORAL

  Oct. 11, 2016, 2:00 PM – Oct. 11, 2016, 2:15 PM

  Authors

  • Chan Xue

    • School of Physics and Optoelectronic Technology, Dalian University of Technology, China

  • Wei Liu

    • School of Physics and Optoelectronic Technology, Dalian University of Technology, China

  • Fei Gao

    • School of Physics and Optoelectronic Technology, Dalian University of Technology, China

  • You-Nian Wang

    • Dalian University of Technology
    • School of Physics and Optoelectronic Technology, Dalian University of Technology,
    • School of Physics and Optoelectronic Technology, Dalian University of Technology, China

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• Gas composition influence on ion energy distribution functions in an industrial ICP reactor with biased cathode.

  ORAL

  Oct. 11, 2016, 2:15 PM – Oct. 11, 2016, 2:30 PM

  Authors

  • David Peterson

    • North Carolina State Univ

  • Steven Shannon

    • North Carolina State Univ

  • David Coumou

    • MKS Instruments RF Power Division

  • Scott White

    • MKS Instruments RF Power Division

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• Studies on the radical species in inductively coupled Ar/CH4 plasma using improved single Langmuir probe diagnostic methods and fluid simulation

  ORAL

  Oct. 11, 2016, 2:30 PM – Oct. 11, 2016, 2:45 PM

  Authors

  • Ju-Hong Cha

    • Department of Electrical Engineering,Pusan National University, Busan, South Korea

  • Kwon-Sang Seo

    • Department of Electrical Engineering,Pusan National University, Busan, South Korea

  • Jung Yeol Lee

    • Department of Electrical Engineering,Pusan National University, Busan, South Korea

  • Hae June Lee

    • Department of Electrical Engineering,Pusan National University, Busan, South Korea

  • Ho-Jun Lee

    • Pusan National University
    • Department of Electrical Engineering,Pusan National University, Busan, South Korea

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• An electromagnetic approach to a small-scale microwave ICP-plasmajet

  ORAL

  Oct. 11, 2016, 2:45 PM – Oct. 11, 2016, 3:00 PM

  Authors

  • Michael Klute

    • Theoretical Electrical Engineering, Ruhr University Bochum, Germany

  • Horia-Eugen Porteanu

    • Microwave Department, Ferdinand-Braun-Institut, Germany

  • Wolfgang Heinrich

    • Microwave Department, Ferdinand-Braun-Institut, Germany

  • Peter Awakowicz

    • Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany

  • Ralf-Peter Brinkmann

    • Theoretical Electrical Engineering, Ruhr University Bochum, Germany

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• Control of electron energy distribution by the power balance of the combined inductively and capacitively coupled RF plasmas

  ORAL

  Oct. 11, 2016, 3:00 PM – Oct. 11, 2016, 3:15 PM

  Authors

  • Jin Seok Kim

    • Pusan National University

  • Ho-Jun Lee

    • Pusan National University
    • Department of Electrical Engineering,Pusan National University, Busan, South Korea

  • Hae June Lee

    • Pusan National University

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• Neutral and ion dynamics at the plasma-surface interface region in inductively coupled plasmas

  ORAL

  Oct. 11, 2016, 3:15 PM – Oct. 11, 2016, 3:30 PM

  Authors

  • Martin Blake

    • York Plasma Institute, University of York, Heslington, York, YO10 5DD

  • Andrew Robert Gibson

    • York Plasma Institute, University of York and Laboratoire de Physique des Plasmas, Ecole Polytechnique
    • 2LPP, Ecole Polytechnique-CNRS-Uni Paris-Sud-UPMC, 91128 Palaiseau, France

  • Kari Niemi

    • York Plasma Institute, University of York, Heslington, York, YO10 5DD

  • Deborah O'Connell

    • York Plasma Institute, University of York
    • York Plasma Institute, University of York, Heslington, York, YO10 5DD
    • University of York

  • Timo Gans

    • University of York
    • York Plasma Institute, University of York, Heslington, York, YO10 5DD

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