Hysteresis in Radio-Frequency Inductively Coupled Plasmas

ORAL

Abstract

We present both experimental and theoretical studies of hysteresis in radio-frequency inductive discharges. It is found that the hysteresis is significantly affected by nonlinearity of the plasma with the modification of electron energy distribution (EED). This kind of hysteresis is also observed in various plasma discharges with powers, pressures, and magnetic field where EEDs are evolved.

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Authors

  • Hyo-Chang Lee

    • Hanyang University

  • Chin-Wook Chung

    • Hanyang University
    • Department of Electrical Engineering, Hanyang University
    • Hanyang Univ.
    • Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea
    • Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea