Plasma Sources

Presentations

• EED$f$ and IED$f$ of the non-ambipolar e$^{-}$-beam plasma and their effects on etch

  COFFEE_KLATCH · Invited

  Nov. 7, 2014, 8:30 AM – Nov. 7, 2014, 9:00 AM

  Authors

  • Lee Chen

    • Tokyo Electron America, Inc.

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• ABSTRACT WITHDRAWN

  Nov. 7, 2014, 9:00 AM – Nov. 7, 2014, 9:15 AM

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• Prevention of ion flux inhomogeneities in large area capacitively coupled discharges via the Electrical Asymmetry Effect

  ORAL

  Nov. 7, 2014, 9:15 AM – Nov. 7, 2014, 9:30 AM

  Authors

  • Edmund Schuengel

    • Department of Physics, West Virginia University, Morgantown, WV 26506

  • Julian Schulze

    • Department of Physics, West Virginia University, Morgantown, WV 26506

  • Sebastian Mohr

    • Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany

  • Uwe Czarnetzki

    • Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany

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• Transient response of pulsed multi-source RF CCP discharges

  ORAL

  Nov. 7, 2014, 9:30 AM – Nov. 7, 2014, 9:45 AM

  Authors

  • Theresa Kummerer

    • North Carolina State University

  • David Peterson

    • North Carolina State University

  • David Coumou

    • MKS Instruments
    • MKS Instruments, ENI Power Division, Rochester NY

  • Steven Shannon

    • North Carolina State University

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• Etching of photoresist with an atmospheric pressure plasma jet

  ORAL

  Nov. 7, 2014, 9:45 AM – Nov. 7, 2014, 10:00 AM

  Authors

  • Andrew West

    • York Plasma Institute, University of York, UK

  • Marc van der Schans

    • Eindhoven University of Technology, The Netherlands

  • Cigang Xu

    • Oxford Instruments Plasma Technology, UK

  • Timo Gans

    • York Plasma Institute, University of York, UK

  • Mike Cooke

    • Oxford Instruments Plasma Technology, UK

  • Erik Wagenaars

    • York Plasma Institute, University of York, UK

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• Development and characterization of a fast neutral beam source for damage-free etching

  ORAL

  Nov. 7, 2014, 10:00 AM – Nov. 7, 2014, 10:15 AM

  Authors

  • Mark Bowden

    • University of Liverpool

  • Daniil Marinov

    • The Open University

  • Adetokunbo Ayilaran

    • The Open University

  • Nicholas Braithwaite

    • The Open University

  • Ziad el Otell

    • IMEC

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• Hysteresis in Radio-Frequency Inductively Coupled Plasmas

  ORAL

  Nov. 7, 2014, 10:15 AM – Nov. 7, 2014, 10:30 AM

  Authors

  • Hyo-Chang Lee

    • Hanyang University

  • Chin-Wook Chung

    • Hanyang University
    • Department of Electrical Engineering, Hanyang University
    • Hanyang Univ.
    • Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea
    • Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea

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