Plasma Boundaries, Sheaths and Diagnostics

Presentations

• A Comparison of Emissive Probe Techniques for Electric Potential Measurements in a Complex Plasma

  ORAL

  Nov. 16, 2011, 2:00 PM – Nov. 16, 2011, 2:15 PM

  Authors

  • J.P. Sheehan

    • University of Wisconsin - Madison

  • Yevgeny Raitses

    • Princeton Plasma Physics Laboratory, Princeton, NJ
    • Princeton Plasma Physics Laboratory

  • Noah Hershkowitz

    • University of Wisconsin - Madison
    • Nuclear Eng. and Eng. Physics, University of Wisconsin, Madison/WI, United States
    • University of Wisconsin-Madison

  • Igor Kaganovich

    • Princeton Plasma Physics Laboratory

  • Nat Fisch

    • Princeton Plasma Physics Laboratory

  View abstract →

• Particle-in-Cell Simulations of Collisional RF Sheaths

  ORAL

  Nov. 16, 2011, 2:15 PM – Nov. 16, 2011, 2:30 PM

  Authors

  • Ying Wang

  • M.A. Lieberman

    • UC Berkeley, Berkeley, CA 94720

  • J.P. Verboncoeur

    • Michigan State University, East Lansing, MI 48824

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• Semi-analytical sheath model for electronegative radio frequency plasmas

  ORAL

  Nov. 16, 2011, 2:30 PM – Nov. 16, 2011, 2:45 PM

  Authors

  • Deuk-Chul Kwon

    • NFRI
    • National Fusion Research Institute

  • Hyonu Chang

  • Jung-Sik Yoon

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• Ar$^+$ and Xe$^+$ Velocities near the Presheath-Sheath Boundary in an Ar-Xe Discharge

  ORAL

  Nov. 16, 2011, 2:45 PM – Nov. 16, 2011, 3:00 PM

  Authors

  • Jon Tomas Gudmundsson

    • Shanghai Jiao Tong University

  • Michael A. Lieberman

    • University of California, Berkeley
    • University of California at Berkeley

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• Anomalous Ion Kinetic Effects in RF Plasma Sheaths

  ORAL

  Nov. 16, 2011, 3:00 PM – Nov. 16, 2011, 3:15 PM

  Authors

  • Michael Barnes

    • MS Barnes Engineering

  • Walter Gekelman

    • Dept. of Physics and Astronomy, UCLA
    • UCLA
    • Dept. of Physics, University of California

  • Patrick Pribyl

    • Dept. of Physics and Astronomy, UCLA
    • UCLA

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• Ion Energy Distributions in Pulsed Inductively-Coupled Plasmas Having a Pulsed Boundary Electrode

  ORAL

  Nov. 16, 2011, 3:15 PM – Nov. 16, 2011, 3:30 PM

  Authors

  • Michael D. Logue

    • U. Michigan

  • H. Shin

    • U. Houston

  • W. Zhu

    • U. Houston

  • L. Xu

    • U. Houston

  • V.M. Donnelly

    • U. Houston

  • D.J. Economou

    • U. Houston

  • Mark J. Kushner

    • U. Michigan
    • University of Michigan

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• ABSTRACT WITHDRAWN

  Nov. 16, 2011, 3:30 PM – Nov. 16, 2011, 3:45 PM

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• Optical Emission Measurements of Electron Temperatures and Metastable Number Densities in a DC/RF Magnetically Confined Xe Plasma

  ORAL

  Nov. 16, 2011, 3:45 PM – Nov. 16, 2011, 4:00 PM

  Authors

  • Vincent M. Donnelly

    • University of Houston

  • Pierre Baele

    • Princeton Plasma Physics Laboratory

  • Yevgeny Raitses

    • Princeton Plasma Physics Laboratory, Princeton, NJ
    • Princeton Plasma Physics Laboratory

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• An approximate method for analysis of double probe characteristic in the absence of ion saturation

  ORAL

  Nov. 16, 2011, 4:00 PM – Nov. 16, 2011, 4:15 PM

  Authors

  • Leonid Dorf

  • Shahid Rauf

    • Applied Materials, Inc.

  • Ken Collins

    • Applied Materials

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• Experimental Study of the Impedance Characteristics of the Plasma Absorption Probe

  ORAL

  Nov. 16, 2011, 4:15 PM – Nov. 16, 2011, 4:30 PM

  Authors

  • Yohei Yamazawa

    • Tokyo Electron Yamanashi Ltd.

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• Cut-off probe analysis and improvement

  ORAL

  Nov. 16, 2011, 4:30 PM – Nov. 16, 2011, 4:45 PM

  Authors

  • Dae-Woong Kim

    • KAIST

  • Shin-Jae You

    • KRISS

  • Byung-Keun Na

    • KAIST

  • Kwang-Ho You

    • KAIST

  • Hong-Young Chang

    • KAIST

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• Resistance and capacitance measurements of the films deposited on a planar Langmuir probe

  ORAL

  Nov. 16, 2011, 4:45 PM – Nov. 16, 2011, 5:00 PM

  Authors

  • Vladimir Samara

    • Imec

  • Mohand Brouri

    • Lam Research Corp.

  • Jean-Francois de Marneffe

    • Imec

  • Alexey P. Milenin

    • Imec

  • Werner Boullart

    • Imec

  View abstract →