Plasma Surface Interactions II
FOCUS · NR2 ·
Presentations
-
Heterogeneous Reactions in Processing Plasmas
COFFEE_KLATCH · Invited
–
Authors
-
Vincent Donnelly
- University of Houston
-
-
Reactivity of atoms adsorbed on catalytic surfaces under plasma exposure
ORAL
–
Authors
-
Daniil Marinov
- LPP, Ecole Polytechnique, UPMC, Universite Paris Sud-11, CNRS, Palaiseau, France
-
Olivier Guaitella
-
Antoine Rousseau
- LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France
-
Marko Huebner
-
Jurgen Roepcke
- INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany
-
Vasco Guerra
-
Carlos Pintassilgo
- Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal
-
-
Plasma-Modification of Mineral Surfaces for Optimizing Froth-Flotation
ORAL
–
Authors
-
Frank May
- Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.)
-
Volker Br\"{u}ser
- Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.)
-
Antje Quade
- Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.)
-
Christian Walter
- Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.)
-
-
Mechanism of Si Oxidation in H$_{2}$/O$_{2}$/Ar Surface Wave Plasma
ORAL
–
Authors
-
Keigo Takeda
- Department of Electrical Engineering and Computer Science, Nagoya University
- Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603
-
Masaru Hori
- Nagoya University
- Department of Electrical Engineering and Computer Science, Nagoya University
- Nagoya Univ.
- Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603
-
-
On plasma based species deposition at a Pyrex surface studied by post plasma N$_{x}$O$_{y}$ conversion
ORAL
–
Authors
-
Juergen Roepcke
- INP-Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald
- INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany
- INP Greifswald, Germany
-
M. Huebner
- INP-Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany
- INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany
-
Daniil Marinov
- LPP, Ecole Polytechnique, UPMC, Universite Paris Sud-11, CNRS, Palaiseau, France
-
Olivier Guaitella
- LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France
- LPP, Ecole Polytechnique, UPMC, Universite Paris Sud-11, CNRS, Palaiseau, France
-
Antoine Rousseau
- Ecole Polytechnique
- LPP, Ecole Polytechnique, UPMC, Universite Paris Sud-11, CNRS, Palaiseau, France
- Laboratoire de Physique des Plasmas
- LPP
- LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France
-
Carlos D. Pintassilgo
- IPFN-Laboratorio Associado, IST, 1049-001 Lisboa, Portugal
- IPFN - Laboratorio Associado, IST, Lisboa, Portugal
-
Vasco Guerra
- IPFN-LA, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal
- Instituto de Plasmas e Fusao Nuclear - Laboratorio Associado, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal
- Instituto de Plasmas e Fus\~ao Nuclear - Laboratorio Associado, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal
- IPFN - Laboratorio Associado, IST, Lisboa, Portugal
-
-
Energy influxes at the substrate in magnetron sputtering processes
ORAL
–
Authors
-
Pierre-Antoine Cormier
- GREMI/Universit\'e d'Orl\'eans
-
Anne-Lise Thomann
- GREMI/CNRS
-
Nadjib Semmar
- GREMI/Universit\'e d'Orl\'eans
-
R\'emi Dussart
- GREMI/Universit\'e d'Orl\'eans
-
Jacky Mathias
- GREMI/CNRS
-
Adil Balhamri
- ChIPS
-
Stephanos Konstadinidis
- ChIPS
-
Rony Snyders
- ChIPS/Materia Nova
-
Olivier Antonin
- LPGP
-
Caroline Boisse-Laporte
- LPGP
-
Tiberiu Minea
- LPGP
-
-
Angular distribution of sputtered platinum particles during argon plasma etching
ORAL
–
Authors
-
Pierre-Marc Berube
- Universite de Montreal
-
Joelle Margot
- Universite de Montreal
-
Sebastien Delprat
- INRS-EMT
-
Mohamed Chaker
- INRS-EMT
-
Jason Afonso-Ferreira
- University of Houston
- Universite de Montreal
-