Plasma Deposition II

Presentations

• High growth rate of GaN homoepitaxy by molecular beam epitaxy using high density nitrogen radical source

  ORAL

  Oct. 6, 2010, 4:00 PM – Oct. 6, 2010, 4:15 PM

  Authors

  • Yohjiro Kawai

    • Nagoya University

  • Yoshio Honda

    • Nagoya University

  • Masahito Yamaguchi

    • Nagoya University

  • Hiroshi Amano

    • Nagoya University

  • Shang Chen

    • Nagoya University

  • Hiroki Kondo

    • Nagoya University

  • Mineo Hiramatsu

    • Meijo University

  • Masaru Hori

    • Nagoya University

  View abstract →

• New Phases of Boron Nitride Grown by Laser-Plasma Synchronous Chemical Vapor Deposition

  ORAL

  Oct. 6, 2010, 4:15 PM – Oct. 6, 2010, 4:30 PM

  Authors

  • Shojiro Komatsu

    • National Institute for Materials Science

  • Kazuaki Kobayashi

    • National Institute for Materials Science

  • Takahiro Nagata

    • National Institute for Materials Science

  • Toyohiro Chikyo

    • National Institute for Materials Science

  View abstract →

• Silicon carbon nitrid thin films prepared by PECVD technology

  ORAL

  Oct. 6, 2010, 4:30 PM – Oct. 6, 2010, 4:45 PM

  Authors

  • Jozef Huran

    • Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia

  • Pavol Boh\'a\v{c}k

    • Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia

  • Valery N. Shvetsov

    • Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia

  • Alexander P. Kobzev

    • Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation

  • Albin Valovi\v{c}

    • Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia

  View abstract →

• Infrared spectroscopic study on substrate bias effects on amorphous carbon deposition process during acetylene plasma

  ORAL

  Oct. 6, 2010, 4:45 PM – Oct. 6, 2010, 5:00 PM

  Authors

  • Masanori Shinohara

    • Graduate School of Sci. and Technol., Nagasaki Univ.

  • Taka-aki Kawakami

    • Graduate School of Sci. and Technol., Nagasaki Univ.

  • Kojiro Hara

    • Graduate School of Sci. and Technol., Nagasaki Univ.

  • Yoshinobu Matsuda

    • Dep. of EEE, Nagasaki Univ.

  • Hiroshi Fujiyama

    • Graduate School of Sci. and Technol., Nagasaki Univ.

  • Yuki Nitta

    • TOYO a-tec

  • Tatsuyuki Nakatani

    • TOYO a-tec

  View abstract →

• Synthesis of bio-compatible coatings stimulated by electron-beam plasma

  ORAL

  Oct. 6, 2010, 5:00 PM – Oct. 6, 2010, 5:15 PM

  Authors

  • Tatiana Vasilieva

    • Moscow Institute of Physics and Technology

  • Sergey Lysenko

    • Moscow Institute of Physics and Technology

  • Vadim Kukareko

    • Institute of Physics and Technology NAS Belarus

  View abstract →

• Investigation of nanoparticle growth in ECR based plasma using Langmuir probe

  ORAL

  Oct. 6, 2010, 5:15 PM – Oct. 6, 2010, 5:30 PM

  Authors

  • Pavel Yuryev

    • LAPLACE
    • Laplace, Toulouse

  • Alexander Drenik

    • Laplace, Toulouse / Joef Stefan Institute, Ljubljana, Slovenia

  • Maria Calafat

    • Laplace, Toulouse

  • Freddy Gaboriau

    • LAPLACE
    • Laplace, Toulouse
    • Universit\'e de Toulouse; UPS, INPT; LAPLACE (Laboratoire Plasma et Conversion d'Energie); 118 route de Narbonne, F-31062 Toulouse cedex 9, France

  • Richard Clergereaux

    • LAPLACE
    • Laplace, Toulouse

  View abstract →

• RF-Plasma Controlled High-Yield Synthesis and Properties of Nitrogen Endohedral Fullerene

  ORAL

  Oct. 6, 2010, 5:30 PM – Oct. 6, 2010, 5:45 PM

  Authors

  • Soon Cheon Cho

    • Department of Electronic Engineering, Tohoku University

  • Toshiro Kaneko

    • Department of Electronic Engineering, Tohoku University
    • Tohoku University

  • Rikizo Hatakeyama

    • Department of Electronic Engineering, Tohoku University

  View abstract →

• Effects of deposition time on the structural and properties of nano-scale grain size beta-tantalum thin films produced by a magnetron sputtering system

  ORAL

  Oct. 6, 2010, 5:45 PM – Oct. 6, 2010, 6:00 PM

  Authors

  • Davoud Dorranian

    • Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran

  • Elmira Solati

    • Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran

  • Mohammadreza Hantehzadeh

    • Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran

  • Mahmood Ghoranneviss

    • Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran

  • Amirhossein Sari

    • Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran

  View abstract →