Transport Coefficients for Electrons in BF3

We use the available cross section data [1] for electron impact on BF3 supplemented by newly calculated cross sections for total scattering, electronic excitation and ionization [2]. Monte Carlo simulation was applied to perform calculations of transport coefficients as well as rate coefficients in DC and RF electric fields. Since BF3 has a high threshold for attachment a presence of some of the F or F2 radicals would affect the properties of plasma significantly. Thus we have supplemented the cross section set by the cross section data for the two radicals and made calculations for different abundances. In addition calculations in crossed electric and magnetic (ExB) fields have been made together with calculations for time resolved coefficients (E(t)xB(t)). We discuss the differences between the original and new cross section set and try to discuss how these will affect the operation of discharges used for ion implantation. \\[4pt] [1] S. Biagi, 2005 unpublished.\\[0pt] [2] M. Vranic, J. Varhambia, M. Radmilovic, J. Tennyson, Z. Lj. Petrovic 2009 to be published.