Poster IIA

Poster IIA

POSTER · SRP1 ·

Presentations

INDUCTIVELY COUPLED PLASMAS

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Real time closed loop control of an Ar and Ar/O$_2$ plasma in an ICP

POSTER
Authors
- R. Faulkner
- F. Sober\'on
- A. McCarter
- D. Gahan
- S. Karkari
- V. Milosavljevic
- C. Hayden
- A. Islyaikin
- V.J. Law
- M.B. Hopkins
  
  Dublin City University, Ireland
- B. Keville
- P. Iordanov
- S. Doherty
- J.V. Ringwood
  
  National University of Ireland, Maynooth
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Electrical and plasma parameters of side type ferromagnetic ICP

POSTER
Authors
- Kyeong Hyo Lee
- Young Kwang Lee
- Sung Won Cho
- Chinwook Chung
  
  Dept. of Electrical Engineering
  Dept. of Electrical Engineering, HanYang University
  Department of Electrical Engineering, HanYang University
  Department of Electrical Engineering Hanyang Univ.
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On the E to H and H to E transition mechanisms in inductively coupled plasmas

POSTER
Authors
- MinHyong Lee
- KyeongHyo Lee
- Chinwook Chung
  
  Dept. of Electrical Engineering
  Dept. of Electrical Engineering, HanYang University
  Department of Electrical Engineering, HanYang University
  Department of Electrical Engineering Hanyang Univ.
View abstract →
On the multistep ionizations in argon inductively coupled plasms

POSTER
Authors
- MinHyong Lee
- SungHo Jang
- Chinwook Chung
  
  Dept. of Electrical Engineering
  Dept. of Electrical Engineering, HanYang University
  Department of Electrical Engineering, HanYang University
  Department of Electrical Engineering Hanyang Univ.
View abstract →
Diagnostics for an inductively coupled plasma in highly Ar-diluted oxygen

POSTER
Authors
- Zhang Yong
- Satoshi Hirao
- Takeshi Ohmori
  
  Keio University
- Takeshi Kitajima
  
  NDA
  National Defense Academy
  National Defence Academy
- Toshiaki Makabe
  
  Keio Univ.
  Keio University
View abstract →
Dynamics of an E-H transition in ICP in Ar

POSTER
Authors
- Satoshi Hirao
- Zhang Yong
- Toshiaki Makabe
  
  Keio Univ.
  Keio University
View abstract →
Experimental Study on Radio Frequency Inductively Coupled Ar/NF$_3$ Discharges

POSTER
Authors
- Katsuyuki Hanaki
- Takashi Kimura
  
  Nagoya Institute of Technology
View abstract →
Probe Measurements and Optical Emission Spectroscopy in RF Inductively Coupled Ar/SF$_6$ Discharges

POSTER
Authors
- Takashi Kimura
  
  Nagoya Institute of Technology
- Michio Mabuchi
  
  Nagoya Institute of Technology
View abstract →
Studies of Mode Transitions in Inductively Coupled Plasma Reactors

POSTER
Authors
- Andre Daltrini
- Stanislav Moshkalev
  
  Universidade Estadual de Campinas, Unicamp, Center for Semiconductor Components, Campinas, SP, Brazil
- Thomas Morgan
  
  Department of Physics, Wesleyan University, Middletown, CT 06457 USA
- William Graham
  
  Physics and Astronomy, Queens University Belfast, BT7 1NN, Northern Ireland
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Measurements of Nonlocal Electron Energy Distribution Functions in the Afterglow of an RF ICP Discharge

POSTER
Authors
- Jon Blessington
  
  West Virginia University
- Charles DeJoseph, Jr.
  
  Air Force Research Laboratory
- Vladimir Demidov
- Mark Koepke
- Jason Wynne
  
  West Virginia University
View abstract →
CAPACITIVELY COUPLED PLASMAS II

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Radio-frequency phase-modulation of spatial electron density in a two-frequency confined capacitive coupled discharge

POSTER
Authors
- S.K. Karkari
- C. Gaman
- A.R. Ellingboe
  
  Dublin City University, Ireland
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ABSTRACT WITHDRAWN

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ABSTRACT WITHDRAWN

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Investigation of the Spatial Distribution Evolution of Electron Temperature in Capacitive Coupled Single- and Dual-Frequency RF Plasmas in Ar/O$_{2}$ mixture over the RF Period.

POSTER
Authors
- S.G. Belostotsky
- O.V. Braginsky
- A.S. Kovalev
- D.V. Lopaev
- T.V. Rakhimova
- A.N. Vasilieva
  
  Univ. of Houston
View abstract →
Capacitive Coupled Single- and Dual-Frequency RF Plasma in Argon

POSTER
Authors
- Olga Proshina
- Oleg Braginsky
- Vladimir Ivanov
- Alexander Kovalev
- Dmitry Lopaev
- Tatyana Rakhimova
- Anna Vasilieva
  
  Institute of Nuclear Physics, Moscow State University, Russia
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Experimental and Theoretical Study of Ion Energy Distribution in SF and DF CCP discharges

POSTER
Authors
- Olga Proshina
- Oleg Braginsky
- Alexander Kovalev
- Dmitry Lopaev
- Yury Mankelevich
- Mike Olevanov
- Tatyana Rakhimova
- Anna Vasilieva
- Dmitry Voloshin
  
  Institute of Nuclear Physics, Moscow State University, Russia
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Optical emission CT of etching plasmas for an effect of the anode phase of LF-bias voltage in a 2f-CCP in Ar and CF$_{4}$/Ar

POSTER
Authors
- Mikio Ishimaru
- Takeshi Ohmori
  
  Keio University
- Takeshi Kitajima
  
  NDA
  National Defense Academy
  National Defence Academy
- Toshiaki Makabe
  
  Keio Univ.
  Keio University
View abstract →
Low-pressure gas breakdown in dual-frequency (27/2 MHz) RF electric fields in nitrogen

POSTER
Authors
- Valeriy Lisovskiy
- Jean-Paul Booth
  
  Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique, Palaiseau 91128, France
- Karine Landry
- David Douai
- Valerick Cassagne
  
  Unaxis Displays Division France SAS, 5, Rue Leon Blum, Palaiseau 91120, France
- Vladimir Yegorenkov
  
  Kharkov National University, Kharkov 61077, Ukraine
View abstract →
Optical Emission Measurements of Dual Frequency Capacitively Coupled Plasmas

POSTER
Authors
- Eric Benck
- Kristen Steffens
  
  National Institute of Standards and Technology
View abstract →
COLLISION PROCESSES IN DISCHARGES AND PLASMAS

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Excitation of the near-uv continuum of H$_2$ by fast H atoms

POSTER
Authors
- A.V. Phelps
  
  JILA, U. of Colorado and NIST
View abstract →
Possible Mechanism of ``Additional'' Production of H$^{-}$ in a Glow Discharge

POSTER
Authors
- S. Belostotskiy
- D. Economou
- D. Lopaev
- T. Rakhimova
View abstract →
Model calculations of the ``flame'' in flowing-afterglow plasmas

POSTER
Authors
- Rainer Johnsen
- Richard Rosati
  
  University of Pittsburgh
- Michael Golde
  
  University of Pittsburgh
View abstract →
Dissociation, recombination and detachment in oxygen discharges diluted with argon

POSTER
Authors
- Jon T. Gudmundsson
  
  University of Iceland
- Eythor G. Thorsteinsson
  
  University of Iceland
View abstract →
Pump/Probe measurement of V-V transfer in O$_{2}$ and H$_{2}$

POSTER
Authors
- Tai Ahn
  
  Univ of California - Riverside
- Igor Adamovich
  
  Ohio State University
- Walter Lempert
  
  Ohio State University
View abstract →
Alignment relaxation and disorientation of Ne*(2p$_{i}$) atoms induced by collisions with He(1s$^{2}$)

POSTER
Authors
- Cristian Bahrim
  
  Department of Chemistry and Physics
- Vaibhav Khadilkar
  
  Department of Computer Science, Lamar University
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The sensitivity of calculated ion transport coefficients for testing ion-neutral interaction potentials

POSTER
Authors
- Mark Hogan
  
  U. S. Merchant Marine Academy
View abstract →
Mobility of O$^{+}$ in He, Ne and Ar and Interaction Potentials of HeO$^{+}$, NeO$^{+}$ and ArO$^{+}$

POSTER
Authors
- Daniel Danailov
  
  Chatham College, Science Division, Pittsburgh, PA 15232
- Larry Viehland
  
  Chatham College
  Chatham College, Science Division
- Rainer Johnsen
  
  University of Pittsburgh, Department of Physics, Pittsburgh, PA 15260
- Timothy Wright
  
  University of Nottingham, UK
- Edmond Lee
  
  University of Southampton, UK and Hong Kong Polytechnic University
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Temperature dependence of argon excimer emission from pulsed discharge excited argon clusters

POSTER
Authors
- Mark Masters
- Hans Suedhoff
- Mike De Armond
- Clint Reynolds
  
  Indiana University-Purdue University Fort Wayne
View abstract →
Effects of Electron Exchange in Fully Differential Cross Sections for Charged Particle Ionization

POSTER
Authors
- J.L. Peacher
- A.L. Harris
- M. Foster
- D.H. Madison
  
  University of Missouri-Rolla
- H.P. Saha
  
  University of Central Florida
- K. Bartschat
  
  Drake University
View abstract →
Low-Energy Electron Impact Ionization of Molecular Hydrogen

POSTER
Authors
- J.G. Childers
- Kelly Kuper
- Murtadha A. Khakoo
  
  California State University, Fullerton, CA 92834, USA
  Cal State University Fullerton, CA 92834
  California State University Fullerton
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Laser optogalvanic spectroscopy of neon and krypton in a discharge plasma

POSTER
Authors
- Naveed Piracha
- Kurt Nesbett
- Sohala Moten
- Phil Moeller
  
  John Carroll University
View abstract →
Importance of Relativistic effects and Exchange between Bound and Continuum Electrons on Electron Impact Ionization of Xenon.

POSTER
Authors
- Z. Stegen
- D.H. Madison
  
  University of Missouri-Rolla
- H.P. Saha
  
  University of Central Florida
- K. Bartschat
  
  Drake University
- S. Bellm
- J. Lower
- R.P. McEachran
- E. Weigold
  
  Australian National University
View abstract →
The role of chemi-ionization in fluorescent lamp discharges

POSTER
Authors
- Abdur Rahman
  
  Osram Sylvania
- Graeme Lister
  
  Osram Sylvania
- Valery Sheverev
  
  Polytechnic University
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