Poster IIA
POSTER · SRP1 ·
Presentations
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INDUCTIVELY COUPLED PLASMAS
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Real time closed loop control of an Ar and Ar/O$_2$ plasma in an ICP
POSTER
Authors
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R. Faulkner
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F. Sober\'on
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A. McCarter
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D. Gahan
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S. Karkari
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V. Milosavljevic
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C. Hayden
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A. Islyaikin
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V.J. Law
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M.B. Hopkins
- Dublin City University, Ireland
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B. Keville
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P. Iordanov
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S. Doherty
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J.V. Ringwood
- National University of Ireland, Maynooth
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Electrical and plasma parameters of side type ferromagnetic ICP
POSTER
Authors
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Kyeong Hyo Lee
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Young Kwang Lee
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Sung Won Cho
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Chinwook Chung
- Dept. of Electrical Engineering
- Dept. of Electrical Engineering, HanYang University
- Department of Electrical Engineering, HanYang University
- Department of Electrical Engineering Hanyang Univ.
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On the E to H and H to E transition mechanisms in inductively coupled plasmas
POSTER
Authors
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MinHyong Lee
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KyeongHyo Lee
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Chinwook Chung
- Dept. of Electrical Engineering
- Dept. of Electrical Engineering, HanYang University
- Department of Electrical Engineering, HanYang University
- Department of Electrical Engineering Hanyang Univ.
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On the multistep ionizations in argon inductively coupled plasms
POSTER
Authors
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MinHyong Lee
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SungHo Jang
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Chinwook Chung
- Dept. of Electrical Engineering
- Dept. of Electrical Engineering, HanYang University
- Department of Electrical Engineering, HanYang University
- Department of Electrical Engineering Hanyang Univ.
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Diagnostics for an inductively coupled plasma in highly Ar-diluted oxygen
POSTER
Authors
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Zhang Yong
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Satoshi Hirao
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Takeshi Ohmori
- Keio University
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Takeshi Kitajima
- NDA
- National Defense Academy
- National Defence Academy
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Toshiaki Makabe
- Keio Univ.
- Keio University
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Dynamics of an E-H transition in ICP in Ar
POSTER
Authors
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Satoshi Hirao
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Zhang Yong
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Toshiaki Makabe
- Keio Univ.
- Keio University
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Experimental Study on Radio Frequency Inductively Coupled Ar/NF$_3$ Discharges
POSTER
Authors
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Katsuyuki Hanaki
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Takashi Kimura
- Nagoya Institute of Technology
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Probe Measurements and Optical Emission Spectroscopy in RF Inductively Coupled Ar/SF$_6$ Discharges
POSTER
Authors
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Takashi Kimura
- Nagoya Institute of Technology
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Michio Mabuchi
- Nagoya Institute of Technology
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Studies of Mode Transitions in Inductively Coupled Plasma Reactors
POSTER
Authors
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Andre Daltrini
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Stanislav Moshkalev
- Universidade Estadual de Campinas, Unicamp, Center for Semiconductor Components, Campinas, SP, Brazil
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Thomas Morgan
- Department of Physics, Wesleyan University, Middletown, CT 06457 USA
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William Graham
- Physics and Astronomy, Queens University Belfast, BT7 1NN, Northern Ireland
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Measurements of Nonlocal Electron Energy Distribution Functions in the Afterglow of an RF ICP Discharge
POSTER
Authors
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Jon Blessington
- West Virginia University
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Charles DeJoseph, Jr.
- Air Force Research Laboratory
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Vladimir Demidov
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Mark Koepke
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Jason Wynne
- West Virginia University
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CAPACITIVELY COUPLED PLASMAS II
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Radio-frequency phase-modulation of spatial electron density in a two-frequency confined capacitive coupled discharge
POSTER
Authors
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S.K. Karkari
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C. Gaman
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A.R. Ellingboe
- Dublin City University, Ireland
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ABSTRACT WITHDRAWN
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ABSTRACT WITHDRAWN
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Investigation of the Spatial Distribution Evolution of Electron Temperature in Capacitive Coupled Single- and Dual-Frequency RF Plasmas in Ar/O$_{2}$ mixture over the RF Period.
POSTER
Authors
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S.G. Belostotsky
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O.V. Braginsky
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A.S. Kovalev
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D.V. Lopaev
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T.V. Rakhimova
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A.N. Vasilieva
- Univ. of Houston
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Capacitive Coupled Single- and Dual-Frequency RF Plasma in Argon
POSTER
Authors
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Olga Proshina
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Oleg Braginsky
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Vladimir Ivanov
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Alexander Kovalev
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Dmitry Lopaev
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Tatyana Rakhimova
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Anna Vasilieva
- Institute of Nuclear Physics, Moscow State University, Russia
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Experimental and Theoretical Study of Ion Energy Distribution in SF and DF CCP discharges
POSTER
Authors
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Olga Proshina
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Oleg Braginsky
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Alexander Kovalev
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Dmitry Lopaev
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Yury Mankelevich
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Mike Olevanov
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Tatyana Rakhimova
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Anna Vasilieva
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Dmitry Voloshin
- Institute of Nuclear Physics, Moscow State University, Russia
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Optical emission CT of etching plasmas for an effect of the anode phase of LF-bias voltage in a 2f-CCP in Ar and CF$_{4}$/Ar
POSTER
Authors
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Mikio Ishimaru
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Takeshi Ohmori
- Keio University
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Takeshi Kitajima
- NDA
- National Defense Academy
- National Defence Academy
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Toshiaki Makabe
- Keio Univ.
- Keio University
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Low-pressure gas breakdown in dual-frequency (27/2 MHz) RF electric fields in nitrogen
POSTER
Authors
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Valeriy Lisovskiy
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Jean-Paul Booth
- Laboratoire de Physique et Technologie des Plasmas, Ecole Polytechnique, Palaiseau 91128, France
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Karine Landry
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David Douai
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Valerick Cassagne
- Unaxis Displays Division France SAS, 5, Rue Leon Blum, Palaiseau 91120, France
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Vladimir Yegorenkov
- Kharkov National University, Kharkov 61077, Ukraine
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Optical Emission Measurements of Dual Frequency Capacitively Coupled Plasmas
POSTER
Authors
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Eric Benck
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Kristen Steffens
- National Institute of Standards and Technology
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COLLISION PROCESSES IN DISCHARGES AND PLASMAS
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Excitation of the near-uv continuum of H$_2$ by fast H atoms
POSTER
Authors
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A.V. Phelps
- JILA, U. of Colorado and NIST
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Possible Mechanism of ``Additional'' Production of H$^{-}$ in a Glow Discharge
POSTER
Authors
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S. Belostotskiy
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D. Economou
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D. Lopaev
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T. Rakhimova
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Model calculations of the ``flame'' in flowing-afterglow plasmas
POSTER
Authors
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Rainer Johnsen
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Richard Rosati
- University of Pittsburgh
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Michael Golde
- University of Pittsburgh
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Dissociation, recombination and detachment in oxygen discharges diluted with argon
POSTER
Authors
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Jon T. Gudmundsson
- University of Iceland
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Eythor G. Thorsteinsson
- University of Iceland
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Pump/Probe measurement of V-V transfer in O$_{2}$ and H$_{2}$
POSTER
Authors
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Tai Ahn
- Univ of California - Riverside
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Igor Adamovich
- Ohio State University
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Walter Lempert
- Ohio State University
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Alignment relaxation and disorientation of Ne*(2p$_{i}$) atoms induced by collisions with He(1s$^{2}$)
POSTER
Authors
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Cristian Bahrim
- Department of Chemistry and Physics
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Vaibhav Khadilkar
- Department of Computer Science, Lamar University
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The sensitivity of calculated ion transport coefficients for testing ion-neutral interaction potentials
POSTER
Authors
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Mark Hogan
- U. S. Merchant Marine Academy
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Mobility of O$^{+}$ in He, Ne and Ar and Interaction Potentials of HeO$^{+}$, NeO$^{+}$ and ArO$^{+}$
POSTER
Authors
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Daniel Danailov
- Chatham College, Science Division, Pittsburgh, PA 15232
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Larry Viehland
- Chatham College
- Chatham College, Science Division
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Rainer Johnsen
- University of Pittsburgh, Department of Physics, Pittsburgh, PA 15260
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Timothy Wright
- University of Nottingham, UK
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Edmond Lee
- University of Southampton, UK and Hong Kong Polytechnic University
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Temperature dependence of argon excimer emission from pulsed discharge excited argon clusters
POSTER
Authors
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Mark Masters
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Hans Suedhoff
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Mike De Armond
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Clint Reynolds
- Indiana University-Purdue University Fort Wayne
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Effects of Electron Exchange in Fully Differential Cross Sections for Charged Particle Ionization
POSTER
Authors
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J.L. Peacher
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A.L. Harris
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M. Foster
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D.H. Madison
- University of Missouri-Rolla
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H.P. Saha
- University of Central Florida
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K. Bartschat
- Drake University
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Low-Energy Electron Impact Ionization of Molecular Hydrogen
POSTER
Authors
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J.G. Childers
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Kelly Kuper
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Murtadha A. Khakoo
- California State University, Fullerton, CA 92834, USA
- Cal State University Fullerton, CA 92834
- California State University Fullerton
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Laser optogalvanic spectroscopy of neon and krypton in a discharge plasma
POSTER
Authors
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Naveed Piracha
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Kurt Nesbett
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Sohala Moten
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Phil Moeller
- John Carroll University
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Importance of Relativistic effects and Exchange between Bound and Continuum Electrons on Electron Impact Ionization of Xenon.
POSTER
Authors
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Z. Stegen
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D.H. Madison
- University of Missouri-Rolla
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H.P. Saha
- University of Central Florida
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K. Bartschat
- Drake University
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S. Bellm
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J. Lower
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R.P. McEachran
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E. Weigold
- Australian National University
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The role of chemi-ionization in fluorescent lamp discharges
POSTER
Authors
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Abdur Rahman
- Osram Sylvania
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Graeme Lister
- Osram Sylvania
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Valery Sheverev
- Polytechnic University
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