Nanoscale High Aspect Ratio Structures

ORAL

Abstract

Nanoscale high aspect ratio structures have possible applications in microfluidic channels, batteries, and fuel cells, among others. We present methods we have been trying to create 3:1 aspect ratio structures in transparent materials that will withstand temperatures needed for CVD or ALD processes; including contact molding, spin and etch back, and replica molding.

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Authors

  • Jonathan Abbott

    • Brigham Young University

  • Robert Davis

    • Brigham Young University

  • Richard VanFleet

    • Brigham Young University

  • Hiram Conley

    • Brigham Young University