Non-volatile tuning of mechanical resonance through applied mechanical stress in suspended BaTiO<sub>3</sub> micro-bridge resonators integrated on Si(100)
ORAL
Abstract
Deepa Guragain1, Laveeza Ahmad2, Xuanyi Zhang3, Matthew Chrysler1, Richard Le1, Jamal Brown1, Zhan Zhang4, Divine P. Kumah3, Ye Cao2, and Joseph H. Ngai1
1Department of Physics, University of Texas-Arlington, Arlington, TX 76019, USA
2Department of Materials Science & Engineering, University of Texas-Arlington, Arlington, TX 76019, USA
3Department of Physics, Duke University, Durham, NC 27710, USA
4Advanced Photon Source, Argonne National Laboratory, Lemont, Illinois 60439, USA
Multifunctional complex oxides exhibit a variety of electromechanical properties that have the potential to enable novel functionalities in nano- and microelectromechanical systems (NEMS/MEMS). Here we present the structural and mechanical behavior of ultra-thin, single-crystalline BaTiO3 that has been integrated on Si(100). The BaTiO3 is epitaxially grown using oxide molecular beam epitaxy and then patterned into suspended microbridge resonators using wet-etch techniques. We find that the mismatch in thermal expansion between the Si and the epitaxial BaTiO3 gives rise to residual strain that not only enhances the resonant frequencies of the microbridges, but also causes exceptionally large changes in resonance frequency with temperature. We also find that momentary mechanical stress applied to the microbridges using sub-nano-Newton forces can induce non-volatile changes in mechanical resonance. The non-volatile changes in resonance are analyzed within the context of quasi-stable ferroelastic domains that become dynamic under applied stress, thereby leading to changes in the Young’s modulus.
1Department of Physics, University of Texas-Arlington, Arlington, TX 76019, USA
2Department of Materials Science & Engineering, University of Texas-Arlington, Arlington, TX 76019, USA
3Department of Physics, Duke University, Durham, NC 27710, USA
4Advanced Photon Source, Argonne National Laboratory, Lemont, Illinois 60439, USA
Multifunctional complex oxides exhibit a variety of electromechanical properties that have the potential to enable novel functionalities in nano- and microelectromechanical systems (NEMS/MEMS). Here we present the structural and mechanical behavior of ultra-thin, single-crystalline BaTiO3 that has been integrated on Si(100). The BaTiO3 is epitaxially grown using oxide molecular beam epitaxy and then patterned into suspended microbridge resonators using wet-etch techniques. We find that the mismatch in thermal expansion between the Si and the epitaxial BaTiO3 gives rise to residual strain that not only enhances the resonant frequencies of the microbridges, but also causes exceptionally large changes in resonance frequency with temperature. We also find that momentary mechanical stress applied to the microbridges using sub-nano-Newton forces can induce non-volatile changes in mechanical resonance. The non-volatile changes in resonance are analyzed within the context of quasi-stable ferroelastic domains that become dynamic under applied stress, thereby leading to changes in the Young’s modulus.
*SUPPORT: NSF CMMI-2132105
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Presenters
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Deepa Guragain
- The University of Texas at Arlington
- Department of Physics, University of Texas-Arlington, Arlington, TX 76019, USA