Bonding diamond membrane on insulator for thermal imaging

Diamond nitrogen-vacancy centers (NV centers) have been widely used for sensing various physical quantities such as magnetic fields, temperature, electric fields, and pressure with various spatial resolutions, from nanometers to millimeters. However, temperature measurements at the microscale using diamonds have a limitation in spatial resolution due to the high thermal conductivity of diamonds. To address the issue, we adopt a hybrid structure such as, a diamond-membrane on an insulator. Here, we investigate the bonding process of the diamond-membrane on a quartz wafer. We make diamond-membrane with Smart Cut, implanting He ions and etching the graphite layer. The temperature variation in the diamond membrane will be simulated and compared to the experimental data. Furthermore, we will implement simultaneous sensing of temperature and magnetic fields using diamonds, which can be a crucial tool for understanding cell growth and detecting errors in integrated chips.