Extending Energy-Dispersive X-ray Spectroscopy to Chemical Shift Detection

ORAL

Abstract

Energy-dispersive X-ray spectroscopy (EDS) is widely used in electron microscopes for elemental analysis. Previously, EDS had been limited to elemental mapping. However, information on an element’s chemical bonding, such as its oxidation state, for example, is often desired. The energy resolution of EDS is typically on the 100-eV level, which seems insufficient to resolve chemical shifts (typically a few eV). Here we apply curve fitting to high-quality energy EDS spectra, achieving spectroscopic precision of 0.1 eV. We demonstrate the detection of chemical shifts in aluminum and tungsten oxide. As modern detectors become more efficient, achieving high counts for chemical shift analysis within a reasonable acquisition time becomes more feasible.

*This work was supported by the Semiconductor Research Corporation (SRC), National Science Foundation (NSF) award DMR-1611036, and NSF STC award DMR-1548924 (STROBE). Data were collected at the Core Center of Excellence in Nano Imaging (University of Southern California), the Electron Imaging Center for Nanosystems (EICN) (RRID:SCR 022900) at the University of California, Los Angeles's California for NanoSystems Institute (CNSI), and the Thermo Fisher Scientific (TFS) Nanoport.

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Publication: https://arxiv.org/abs/2409.15639

Presenters

  • Matthew H Mecklenburg

    • University of California Los Angeles

Authors

  • Matthew H Mecklenburg

    • University of California Los Angeles

  • Yarin Heffes

    • University of California, Los Angeles

  • Rebekah M Jin

    • University of California, Los Angeles

  • Tristan P O'Neill

    • University of California, Los Angeles (UCLA)
    • University of California, Los Angeles

  • Jared J Lodico

    • University of California, Los Angeles

  • Brian T Zutter

    • California State University, Los Angeles

  • Brian Christopher Regan

    • University of California, Los Angeles

  • Yueyun Chen

    • University of California, Los Angeles