Oral: Advances in Spin Qubit Devices: Interconnect and Magnet Optimization for Scalability

ORAL

Abstract

Recent developments in control of spin qubits have shown exciting results [1,2]. In order to successfully scale quantum chips to larger numbers of high-fidelity qubits, improvement in the quality of the material is necessary. In this talk, we present some of our recent work on metals, magnetic material, and dielectric material analysis used in the fabrication of our spin qubit devices. Such analyses are critical to get a better understanding on how to improve performance of our devices to increase scalability. First, we describe the multi-layered test structures added alongside the spin qubit devices in order to evaluate how material properties change throughout the fabrication process [3]. We find that selected fabrication steps lead to increase in the resistivity of the palladium interconnects. Then, we discuss the optimization of the magnetic films used to create the micromagnets that are used for qubit driving and addressability. Finally, with metal-insulator-metal devices, we evaluate the quality of the dielectric material and show what impact the lithographic process (e.g., optical vs. e-beam) has on its reliability.

*We acknowledge helpful collaboration and discussion with L.M.K. Vandersypen, M. Veldhorst and G. Scappucci and co-workers (QuTech and TU Delft). This work was supported by the Early Research Programme of the Netherlands Organisation for Applied Scientific Research (TNO) with additional support from the Top Sector High Tech Systems and Materials and the National Growth Fund Quantum Technology.

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Publication: [1] Philips et al., Nature 609, 919 (2022).
[2] Xue et al., Nature 601, 343 (2022).
[3] Verberk et al., Proc. SPIE 12472, 37th European Mask and Lithography Conference, 1247207 (2022).

Presenters

  • Larysa Tryputen

    • QuTech and TNO Netherlands Organization for Applied Research
    • TNO Netherlands Organization for Applied Scientific Research
    • QuTech and Netherlands Organization for Applied Scientific Research (TNO),

Authors

  • Larysa Tryputen

    • QuTech and TNO Netherlands Organization for Applied Research
    • TNO Netherlands Organization for Applied Scientific Research
    • QuTech and Netherlands Organization for Applied Scientific Research (TNO),

  • David J Michalak

    • QuTech and TNO Netherlands Organization for Applied Scientific Research, Delft
    • QuTech/TNO

  • Timo J. J Willigers

    • QuTech and TNO Netherlands Organization for Applied Scientific Research

  • Hitham Amin

    • QuTech and Kavli Institute of Nanoscience, Delft University of Technology, Delft

  • Saurabh Karwal

    • QuTech and TNO Netherlands Organization for Applied Scientific Research
    • TNO/QuTech

  • Sergey V Amitonov

    • QuTech and TNO Netherlands Organization for Applied Scientific Research
    • QuTech and Netherlands Organization for
    • QuTech/TNO
    • QuTech and Netherlands Organization for Applied Scientific Research (TNO), The Netherlands

  • Amir Sammak

    • QuTech
    • QuTech and TNO Netherlands Organization for Applied Scientific Research
    • TNO/QuTech
    • Delft University of Technology
    • TNO
    • QuTech/TNO
    • QuTech and Netherlands Organization for Applied Scientific Research (TNO), The Netherlands
    • QuTech and Netherlands Organisation for Applied Scientific Research (TNO)

  • Eftychia Tsapanou-Katranara

    • QuTech and TNO Netherlands Organization for Applied Scientific Research

  • Önder Gül

    • QuTech and TNO Netherlands Organization for Applied Scientific Research
    • QuTech/TNO

  • Luca Mazzarella

    • QuTech and TNO Netherlands Organization for Applied Scientific Research

  • Gertjan Eenink

    • QuTech and TNO Netherlands Organization for Applied Scientific Research

  • Yoram Vos

    • QuTech and TNO Netherlands Organization for Applied Scientific Research
    • QuTech/TNO

  • Rick N Wasserman

    • QuTech and TNO Netherlands Organization for Applied Scientific Research
    • QuTech/TNO

  • Rabah Hanfoug

    • QuTech and TNO Netherlands Organization for Applied Scientific Research

  • Nodar Samkharadze

    • QuTech and TNO Netherlands Organization for Applied Scientific Research
    • QuTech/TNO

  • Giordano Scappucci

    • TU Delft QuTech
    • QuTech and Kavli Institute of Nanoscience, Delft University of Technology
    • TU Delft
    • QuTech and Kavli Institute of Nanoscience, TU Delft, The Netherlands

  • Menno Veldhorst

    • QuTech and Kavli Institute of Nanoscience, Delft University of Technology
    • Delft University of Technology

  • Lieven M. K Vandersypen

    • QuTech and Kavli Institute of Nanoscience, Delft University of Technology
    • TU Delft
    • QuTech and Kavli Institute of Nanoscience, TU Delft, The Netherlands