Recent results on manufacturing spin and superconducting qubits in advanced 300 mm fabrication environments

ORAL

Abstract

In this talk, we will report on recent progress in manufacturing spin and superconducting qubits using advanced 300 mm manufacturing lines at imec. Both progress on Si MOS qubits and demonstrations of Si/SiGe spin qubits will be discussed, as well as the realization of high coherence superconducting transmon qubits using subtractively etched junctions, bypassing the need for shadow evaporation.

We will comment on the challenges and benefits of moving such qubits to a 300 mm fab environment, and the challenges and opportunities offered with respect to upscaling of the technology.



*This work is supported, in part, by the imec Industrial Affiliation Program on Quantum Computing. We acknowledge support from the ECSEL Joint Undertaking MatQu project under grant agreement No 101007322.This project has also received funding from the European Union’s Horizon 2020 research and innovation programme QLSI project under grant agreement No 951852.

Publication: Verjauw, J. et al, npj Quantum 8, 93 (2022)
Van Damme, J. et al., Phys. Rev. Applied 20, 014034 (2023)
Elsayed, A. et al, arXiv:2212.06464 (2022)
Shehata M. et al., PRB 108, 045305 (2023)

Presenters

  • Kristiaan De Greve

    • IMEC

Authors

  • Kristiaan De Greve

    • IMEC
  • Yann Canvel

    • IMEC
    • imec
  • Imri Fattal

    • imec
  • Clement Godfrin

    • IMEC
  • Alexander Grill

    • imec
  • Stefan Kubicek

    • imec
    • IMEC
  • Julien Jussot

    • IMEC
    • imec
  • Tsvetan Ivanov

    • imec
    • IMEC
  • Ryan Leong

    • imec
    • KU Leuven
  • Roy Li

    • IMEC
    • imec
  • Shana Massar

    • IMEC
    • imec
  • Massimo Mongillo

    • IMEC
    • imec
  • Daniel Perez Lozano

    • imec
  • Antoine Pacco

    • imec
  • Anton Potocnik

    • IMEC
    • imec
  • Bart Raes

    • imec
    • IMEC
  • George Simion

    • IMEC
    • imec
  • A. M. Vadiraj

    • imec
    • IMEC
  • Jacques Van Damme

    • KU Leuven
  • Danny Wan

    • IMEC
    • imec