Reducing Losses in Transmon Qubits Using Fluorine-Based Etches

ORAL

Abstract

Superconducting qubits have developed from proof-of principle single-bit demonstrations to mature deployments of many-qubit quantum processors. Reducing materials- and processing-induced decoherence in superconducting qubit circuits is critical to further the development of large-scale quantum architectures. In this talk we discuss the results of applying selective fluorine-based etches, targeting lossy silicon oxides, in close proximity to sensitive aluminum circuit elements such as Josephson Junctions, resonators and crossover tethers. These fabrication improvements can be implemented with little to no damage to existing structures. The impact that these have on transmon qubit coherence will be discussed.

*This material is based upon work supported under Air Force Contract No. FA8702-15-D-0001. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the U.S. government or the U.S. Air Force.

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Presenters

  • Michael A Gingras

    • MIT Lincoln Laboratory

Authors

  • Michael A Gingras

    • MIT Lincoln Laboratory

  • Bethany M Niedzielski

    • MIT Lincoln Lab
    • MIT Lincoln Laboratory

  • Ali Sabbah

    • MIT Lincoln Laboratory

  • Felipe Contipelli

    • MIT Lincoln Laboratory

  • Kate Azar

    • MIT Lincoln Laboratory
    • Wellesley Coll

  • Greg Calusine

    • MIT Lincoln Lab

  • Cyrus F Hirjibehedin

    • MIT Lincoln Lab

  • David K Kim

    • MIT Lincoln Lab
    • MIT Lincoln Laboratory

  • Jeffrey Knecht

    • MIT Lincoln Lab
    • MIT Lincoln Laboratory

  • Christopher O'Connell

    • MIT Lincoln Laboratory

  • Alexander Melville

    • MIT Lincoln Laboratory

  • Hannah Stickler

    • MIT Lincoln Laboratory

  • Mollie E Schwartz

    • MIT Lincoln Laboratory

  • Jonilyn L Yoder

    • MIT Lincoln Lab
    • MIT Lincoln Laboratory

  • William D Oliver

    • Massachusetts Institute of Technology MI
    • Massachusetts Institute of Technology
    • Massachusetts Institute of Technology (MIT)
    • Massachusetts Institute of Technology MIT

  • Kyle Serniak

    • MIT Lincoln Laboratory & MIT RLE
    • MIT Lincoln Laboratory
    • MIT Lincoln Laboratory, MIT RLE