Towards Si finFET quantum devices with reproducible behavior

ORAL

Abstract

Hole spin qubits in Si finFETs show great promise for a quantum computing platform exhibiting fast and all electrical qubit control, even when operated at temperatures above 1K. While charge noise affects all platforms, disorder is one of the main limitations in current Si-MOS qubit technology.

Here, we present our work towards reducing disorder and trapped charges by investigating material stacks utilizing Hall bar and percolation density measurements. Additionally, fabricating quantum dot devices with ultra-small gate length and pitch will enable a path towards mitigating disorder. We show Si finFET quantum dot devices exhibiting sub 20 nm gate lengths with a small pitch, fabricated with high-resolution e-beam lithography. The reproducibility of quantum dot formation is assessed through transport measurements, RF gate reflectometry, and charge sensing. From these results we draw conclusions on gate stack and fin shape optimization.

*This work was supported as a part of NCCR SPIN, a National Centre of Competence (or Excellence) in Research, funded by the Swiss National Science Foundation (grant number 51NF40-180604). Additionally, this work has received funding from the European Union's Horizon 2020 research and innovation programme under the Marie Sklodowska-Curie grant agreement No 899018.

Presenters

  • Matthias Mergenthaler

    • IBM Research Europe - Zurich

Authors

  • Matthias Mergenthaler

    • IBM Research Europe - Zurich
  • Felix Schupp

    • IBM Research Europe - Zurich
  • Noelia Vico-Trivino

    • IBM Research Europe - Zurich
  • Konstantinos Tsoukalas

    • IBM Research Europe - Zurich
  • Lisa Sommer

    • IBM Research Europe - Zurich
  • Eoin G Kelly

    • IBM Research Europe - Zurich
  • Michele Aldeghi

    • IBM Research Europe - Zurich
    • IBM Research - Zurich
  • Nico Hendrickx

    • IBM Research
    • IBM Research Europe - Zurich
    • Delft University of Technology
    • QuTech and Kavli Institute of Nanoscience, Delft University of Technology, P.O. Box 5046, 2600 GA Delft, The Netherlands
  • Leonardo Massai

    • IBM Research Europe - Zurich
  • Andreas V Kuhlmann

    • University of Basel
  • Ute Drechsler

    • IBM Research Europe - Zurich
  • Antonis Olziersky

    • IBM Research Europe - Zurich
  • Peter Müller

    • IBM Research Europe - Zurich
  • Stephan Paredes

    • IBM Research Europe - Zurich
  • Gian Salis

    • IBM Research Europe - Zurich
  • Patrick Harvey-Collard

    • IBM Research Europe - Zurich
    • IBM Research - Zurich
  • Andreas J Fuhrer

    • IBM Research Europe - Zurich