Mitigation of Interface Losses in Transmon Qubits Using Hydrofluoric Etches

ORAL

Abstract

Superconducting transmon qubits, a promising hardware platform for quantum computing applications, have developed from proof-of principle single-bit demonstrations to mature deployments of many-qubit quantum processors. Reducing losses in superconducting qubit circuits is critical to further the development of large-scale transmon architectures. In this talk we discuss the potential of hydrofluoric etches to remove lossy silicon oxides in close proximity to sensitive circuit elements such as Josephson Junctions, resonators and crossover tethers. This etch can be implemented at several different process points during the fabrication of these elements with little to no damage to existing structures. The results and future potential of these etches will be discussed.

*This material is based upon work supported under Air Force Contract No. FA8702-15-D-0001. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the U.S. Air Force.

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Presenters

  • Michael A Gingras

    • MIT Lincoln Lab
    • MIT Lincoln Laboratory

Authors

  • Michael A Gingras

    • MIT Lincoln Lab
    • MIT Lincoln Laboratory

  • Kyle Serniak

    • MIT Lincoln Laboratory

  • Greg Calusine

    • MIT Lincoln Lab

  • David K Kim

    • MIT Lincoln Lab
    • MIT Lincoln Laboratory

  • Alexander Melville

    • MIT Lincoln Laboratory

  • Ali Sabbah

    • MIT Lincoln Laboratory

  • Kate Azar

    • MIT Lincoln Laboratory

  • Wayne Woods

    • MIT Lincoln Lab

  • Jeffrey Knecht

    • MIT Lincoln Lab
    • MIT Lincoln Laboratory

  • Bethany M Niedzielski

    • MIT Lincoln Lab
    • MIT Lincoln Laboratory

  • Cyrus F Hirjibehedin

    • MIT Lincoln Lab

  • Mollie E Schwartz

    • MIT Lincoln Laboratory

  • Jonilyn L Yoder

    • MIT Lincoln Lab
    • MIT Lincoln Laboratory

  • William D Oliver

    • Massachusetts Institute of Technology MIT
    • Massachusetts Institute of Technology (MIT), MIT Lincoln Laboratory
    • Massachusetts Institute of Technology (MIT)
    • Massachusetts Institute of Technology
    • Massachusetts Institute of Technology, MIT Lincoln Laboratory