Photocapacitance spectroscopy on Au/TiO₂ Schottky diodes

Optically transparent electrodes allow deep level transient photocapacitance spectroscopy on Au/TiO₂ Schottky diodes. We report the measurement of photocapacitance transients and compare them to the corresponding conventional transient capacitance. It is demonstrated that the methods are complementary and both of them allow, via a rate equation model, the determination of the binding energy as well as the capture cross section of the dominant traps. Furthermore, information about the capture process can be extracted.