Module development of Si quantum technology for a practical quantum computer

Si-based qubits are promising for their long spin decoherence and VLSI compatibility. In the past decade, physicists have demonstrated great progress on qubit physics and Si six-qubits was reported recently. To build up a practical quantum computer, there are still hurdles to overcome from an engineering perspective. Critical modules require intensive investigation, such as material growth of ²⁸Si-enriched Si/SiGe heterostructure, ESR/EDSR devices for multi-qubit control, quantum CAD for qubit design, peripheral I/O access circuits, and cryo-CMOS characterization and SPICE modeling. In this talk, I will briefly introduce our strategy and show preliminary results at National Taiwan University (NTU) and Taiwan Semiconductor Research Institute (TSRI), Taiwan.