KTaO<sub>3</sub>-based nanoelectronic devices

ORAL

Abstract

The KTaO3 (KTO)-based two dimensional electron gas (2DEG) has recently elicited wide interest in the field of oxide interfaces. Tantalum’s 5d electrons have a much stronger spin-orbit coupling compared to the titanium 3d orbital found in the extensively studied SrTiO3 (STO) system. KTO (110)- and (111)-based heterostructures show superconductivity with a critical temperature near 1 K and 2 K, respectively [1,2], one order larger than the Tc of STO. Here we report reversible patterning of the 2DEG at the LAO/KTO interface using two techniques: (1) conductive atomic force microscope (c-AFM) lithography and (2) ultra low voltage electron beam lithography (ULV-EBL) [3]. The resolution of these two techniques can reach below 20 nm. Creation of nanoelectronic devices can provide insights into the pairing mechanism of KTO, and also enables KTO to be a potential platform for spintronics or quantum information applications.

[1] Liu, Changjiang, et al. Science 371.6530 (2021): 716-721.

[2] Chen, Zheng, et al. Physical Review Letters 126.2 (2021): 026802.

[3] Yu, Muqing, et al. Nano Lett. 22.15 (2022): 6062–6068

*J.L. acknowledges support from the DOE-QIS program (DE-SC0022277). J.L. and P.I. acknowledge support from NSF (PHY-1913034). All work at Argonne was supported by the US Department of Energy, Office of Science, Basic Energy Sciences, Materials Sciences and Engineering Division. The use of facilities at the Center for Nanoscale Materials and the Advanced Photon Source, both Office of Science user facilities, was supported by the US Department of Energy, Basic Energy Sciences under Contract No. DE-AC02-06CH11357.

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Publication: Nano Lett. 2022, 22, 15, 6062–6068

Presenters

  • Muqing Yu

    • University of Pittsburgh

Authors

  • Muqing Yu

    • University of Pittsburgh

  • Changjiang Liu

    • University at Buffalo
    • University at Buffalo, SUNY
    • Argonne National Laboratory

  • Dengyu Yang

    • University of Pittsburgh
    • Pittsburgh Quantum Institute

  • Xi Yan

    • Argonne National Laboratory

  • Qianheng Du

    • Argonne National Laboratory

  • Dillon D Fong

    • Argonne National Laboratory
    • Materials Science Division, Argonne National Laboratory

  • Anand Bhattacharya

    • Argonne National Laboratory

  • Patrick R Irvin

    • University of Pittsburgh

  • Jeremy Levy

    • University of Pittsburgh
    • Department of Physics and Astronomy, University of Pittsburgh