Visualization of acoustic mode conversion and power flow in suspended thin-film phononic device

ORAL

Abstract

Acoustic wave plays a critical role in electromechanical devices, which are widely utilized in wireless communication and quantum information systems. Since conventional terminal-to-terminal measurement misses important local features of acoustic fields, a new characterization method with high spatial resolution of the acoustic profile is highly sought after. Using a transmission-mode microwave impedance microscope (T-MIM), we directly visualize the acoustic mode conversion and power flow in suspended thin-film phononic devices. Moreover, with fast Fourier transform (FFT) filtering, the forward and backward propagation can be separately analyzed and the propagation loss for both waves calculated. Our result shows that T-MIM can be used as advanced characterization method for acoustic platforms including filters, resonators, phononic crystals, and acoustic metamaterials.

*The TMIM work was supported by NSF Division of Materials Research Grant DMR-2004536 and Welch Foundation Grant F-1814. The data analysis was partially supported by the NSF through the Center for Dynamics and Control of Materials, an NSF Materials Research Science and Engineering Center (MRSEC) under Cooperative Agreement DMR-1720595. The phononic device fabrication work was supported by DARPA Microsystems Technology Office (MTO) Near Zero Power RF, Sensor Operations (N-ZERO) project programs, NSF Award EFMA-1741656 and EFMA-1641109. Part of this work was conducted at the Washington Nanofabrication Facility / Molecular Analysis Facility, a National Nanotechnology Coordinated Infrastructure (NNCI) site at the University of Washington with partial support from the National Science Foundation via awards NNCI-1542101 and NNCI-2025489.

–

Presenters

  • Daehun Lee

    • University of Texas at Austin

Authors

  • Daehun Lee

    • University of Texas at Austin

  • Qiyu Liu

    • University of Washington

  • Huan Li

    • Zhejiang University

  • Lu Zheng

    • University of Texas at Austin

  • Xuejian Ma

    • University of Texas at Austin

  • Shawn I Meyer

    • University of Texas at Austin

  • Songbin Gong

    • University of Illinois Urbana-Champaign

  • Ruochen Lu

    • University of Texas at Austin

  • Mo Li

    • University of Washington

  • Keji Lai

    • University of Texas at Austin