Characterization of CPW resonators on InAs-Al heterostructures

Superconducting microwave coplanar waveguide (CPW) resonators are essential for many quantum devices. From applications in quantum information to sensing CPW, resonators are used as an integral part of superconducting circuits. In the pursuit of gatemon microwave devices on III/V and Si, we characterize resonators on these substrates under fabrication conditions for qubit processors. We study the internal and external Q factors from the complex transmission signal. Furthermore, we also investigate the influence of environmental terms to find the limitations for microwave circuits on InP and Si platforms.