Si/SiGe Single Spin Qubit Devices Enabled by Advanced Semiconductor Fabrication

Reaching quantum practicality, where a quantum computer can solve useful problems, will likely require a million qubits. Semiconductor-based quantum computers can use advanced semiconductor manufacturing, making this a promising approach for scaling qubit count. But to take full advantage of this we need to take all the tools used to make massively scaled transistors devices and apply them to spin-qubit devices. However, quantum bits are more fragile than classical bits and require cryogenic systems for operation and testing. To enable the fast feedback methodology used in industry, the 300mm cryoprober was developed; it measures entire wafers at 1.6K. This tool allows down-selection of spin qubit devices for measurements in a dilution fridge and also provides critical feedback on fabrication processing. This has led to highly coherent Si/SiGe spin qubit devices fabricated using EUV lithography. Here, we'll discuss bringing high-volume tools and methods to the fabrication of spin qubit devices, including extending these to cryogenic temperatures. We observe well-controlled, stable, quantum dot devices with independent barrier control. Qubit control is achieved using EDSR with on-chip micromagnets. The results are reproducible on multiple devices and fridges.