Ultrahigh-inductance materials from spinodal decomposition

Disordered superconducting nitrides with kinetic inductance have long been considered a leading material candidate for high-inductance quantum-circuit applications. Despite continuing efforts in reducing material dimensions to increase the kinetic inductance and the corresponding circuit impedance, it becomes a fundamental challenge to improve further without compromising material qualities. To this end, we propose a method to drastically increase the kinetic inductance of superconducting materials via spinodal decomposition while keeping a low microwave loss. We use epitaxial Ti_0.48Al_0.52N as a model system, and for the first time demonstrate the utilization of spinodal decomposition to trigger the insulator-to-superconductor transition with a drastically enhanced material disorder. The measured kinetic inductance has increased by 2-3 orders of magnitude compared with all the best reported disordered superconducting nitrides. Our work paves the way for substantially enhancing and deterministically controlling the inductance of superconducting circuit elements for advanced quantum-circuit fabrication.