Nanoscale control of LaAlO<sub>3</sub>/SrTiO<sub>3</sub> metal-insulator transition using ultra-low-voltage electron-beam lithography

ORAL

Abstract

We describe a method to control the insulator-metal transition at the LaAlO3/SrTiO3 interface using ultra-low-voltage electron beam lithography (ULV-EBL). Compared with previous reports that utilize conductive atomic-force-microscope lithography (c-AFM), this approach can provide comparable resolution (~10 nm) at write speeds (10 mm/s) that are up to 10,000x faster than c-AFM. The writing technique is non-destructive and the conductive state is reversible via prolonged exposure to air. Transport properties of representative devices are measured at milli-Kelvin temperatures, where superconducting behavior is observed. We also demonstrate the ability to create conducting devices on graphene/LaAlO3/SrTiO3 and hBN/graphene/LaAlO3/SrTiO3 heterostructures. The underlying mechanism is believed to be closely related to the same mechanism regulating c-AFM-based methods.

*The work at University of Pittsburgh was supported by ONR grant N00014-20-1-2481 and by Vannevar Bush Faculty Fellowship ONR grant N00014-15-2847. The work at University of Wisconsin-Madison (synthesis characterization of epitaxial thin film heterostructures) was supported by the US Department of Energy (DOE), Office of Science, Office of Basic Energy Science (BES), under award number DE-FG02-06ER46327.

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Presenters

  • Dengyu Yang

    • Physics and Astronomy, University of Pittsburgh
    • University of Pittsburgh

Authors

  • Dengyu Yang

    • Physics and Astronomy, University of Pittsburgh
    • University of Pittsburgh

  • Shan Hao

    • Physics and Astronomy, University of Pittsburgh
    • Department of Physics & Astronomy, University of Pittsburgh
    • University of Pittsburgh

  • Jun Chen

    • Electrical and Computer Engineering, University of Pittsburgh

  • Qing Guo

    • Physics and Astronomy, University of Pittsburgh

  • Muqing Yu

    • Physics and Astronomy, University of Pittsburgh
    • University of Pittsburgh

  • Yang Hu

    • Physics and Astronomy, University of Pittsburgh
    • University of Pittsburgh

  • Kitae Eom

    • Materials Science and Engineering, University of Wisconsin-Madison
    • Department of Materials Science and Engineering, University of Wisconsin-Maddison
    • Department of Materials Science and Engineering, University of Wisconsin
    • Department of Materials Science Engineering, University of Wisconsin-Madison
    • Department of Materials Science and Engineering, University of Wisconsin-Madison,, University of Wisconsin
    • Material Science and Engineering, University of Wisconsin-Madison
    • University of Wisconsin-Madison
    • University of Wisconsin-Maddison

  • Jungwoo Lee

    • Materials Science and Engineering, University of Wisconsin-Madison
    • University of Wisconsin, Madison
    • Department of Materials Science and Engineering, University of Wisconsin-Madison,, University of Wisconsin
    • University of Wisconsin-Madison
    • University of Wisconsin-Maddison
    • Department of Materials Science and Engineering, University of Wisconsin-Madison

  • Chang-Beom Eom

    • Materials Science and Engineering, University of Wisconsin-Madison
    • University of Wisconsin, Madison
    • Department of Materials Science and Engineering, University of Wisconsin-Maddison
    • Department of Materials Science and Engineering, University of Wisconsin
    • Department of Materials Science Engineering, University of Wisconsin-Madison
    • Department of Materials Science and Engineering, University of Wisconsin-Madison,, University of Wisconsin
    • Material Science and Engineering, University of Wisconsin-Madison
    • University of Wisconsin-Madison
    • University of Wisconsin-Maddison
    • University of Wisconsin - Madison
    • University of Wisconsin Madison
    • Department of Materials Science and Engineering, University of Wisconsin-Madison

  • Patrick R Irvin

    • Physics and Astronomy, University of Pittsburgh
    • University of Pittsburgh
    • Department of Physics and Astronomy, University of Pittsburgh
    • Department of Physics & Astronomy, University of Pittsburgh

  • Jeremy Levy

    • Physics and Astronomy, University of Pittsburgh
    • University of Pittsburgh
    • Department of Physics and Astronomy, University of Pittsburgh
    • Department of Physics & Astronomy, University of Pittsburgh