Gate-defined quantum dots in monolayer and bilayer WSe<sub>2</sub>: Part I, Fabrication

ORAL

Abstract

Gate-defined quantum dots in monolayer and bilayer WSe2 are a platform for novel quantum transport and quantum optoelectronic investigations of WSe2, as well as for potential applications in coherent valleytronics. In this presentation, we discuss design considerations and implementations for the fabrication of ~100 nm diameter gate-defined, p-type quantum dots in monolayer and bilayer WSe2. The devices were controlled using a combination of bottom confining gates and a top accumulation gate, with hBN used for gate insulation and encapsulation of the WSe2. Top hBN and WSe2 were transferred onto Pt for reliable p-type bottom contact.

*We acknowledge support from AFOSR award numbers FA9550-16-1-0203 and FA9550-20-1-0207.

Presenters

  • Jeb Stacy

    • University of Arkansas

Authors

  • Jeb Stacy

    • University of Arkansas
  • Shiva Davari Dolatabadi

    • University of Arkansas
  • Alejandro Mercado

    • University of British Columbia
  • Jeremy Tull

    • University of Arkansas
  • Rabindra Basnet

    • University of Arkansas
    • Department of Physics, University of Arkansas
  • Krishna Pandey

    • University of Arkansas
  • Md Rafique Un Nabi

    • University of Arkansas
  • Kenji Watanabe

    • National Institute for Materials Science
    • National Institute for Materials Science, Japan
    • National Institure for Materials Science
    • Advanced Materials Laboratory, National Institute for Materials Science
    • NIMS
    • National Institute of Materials Science
    • National Institute for Materials Science (NIMS)
    • Research Center for Functional Materials, National Institute for Materials Science
    • National Institute for Materials Science,1-1 Namiki
    • National Institute of Material Science
    • National Institute for Materials Science, Tsukuba, Japan
    • Research Center for Functional Materials, NIMS
    • National Institute of Materials Science, Tsukuba, Japan
    • National Institude for Materials Science
    • National Institute for Materials Science, Tsukuba, Ibaraki, Japan
    • Research Center for Functional Materials, National Institute for Materials Science, Tsukuba 305-0044, Japan
    • International Center for Materials Nanoarchitectonics, National Institute for Materials
    • NIMS - Japan
    • National Institute for Materials Science ,Japan
    • National Institute for Materials Science, Tsukuba, 305-0044, Ibaraki, Japan
    • National Institute for Material Science
    • National Institute for Material Science, 1-1 Namiki, Tsukuba 305-0044, Japan
    • National Institute for Material Science Japan
    • NIMS Tsukuba
    • National Institute for Materials Science, Research Center for Functional Materials, Japan
    • Research Center for Functional Materials, National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan
    • National Institute for Materials Science: Namiki, Tsukuba, Ibaraki, JP
    • National Institue for Material Science
    • National Institute for Materials Science,1-1 Namiki, Tsukuba, 305-0044, Japan
    • Materials, NIMS
    • Research Center for Functional Materials, National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan, Research Center for Functional Materials, National In
    • Research Center for Functional Materials, Japan
    • International Center for Materials Nanoarchitectonics, National Institute for Materials Science
    • International Center for Materials nanoarchtectonics, National Institute for Materials Science, 1-1 Namiki, Tsukuba, 305-0044, Japan
    • NIMS Suguba
    • NIMS, Tsukuba, Japan
    • National Institute for Materials Science, Namiki 1-1, Tsukuba, 305-0044, Ibaraki, Japan
    • National institute of material science
    • Advanced Materials Laboratory, National Institute for Materials Science, 1-1 Namiki, Tsukuba, 305-0044, Japan
    • Advanced Materials Laboratory, NIMS
    • Research Center for Functional Materials, National Institute for Materials Science, Ibaraki, Japan
    • National Institute for Materials Science, Research Center for Functional Materials
    • National Institute of Material Science, Japan
    • Tsukuba, National Institute for Materials Science
  • Takashi Taniguchi

    • National Institute for Materials Science
    • National Institute for Materials Science, Japan
    • National Institure for Materials Science
    • Advanced Materials Laboratory, National Institute for Materials Science
    • NIMS
    • National Institute of Materials Science
    • National Institute for Materials Science (NIMS)
    • International Center for Materials Nanoarchitectonics, National Institute for Materials Science
    • National Institute for Materials Science,1-1 Namiki
    • National Institute of Material Science
    • National Institute for Materials Science, Tsukuba, Japan
    • International Center for Materials Nanoarchitectonics, NIMS
    • Research Center for Functional Materials, National Institute for Materials Science
    • National Institute of Materials Science, Tsukuba, Japan
    • National Institude for Materials Science
    • International Center for Materials Nanoarchitectonics, National Institute for Materials Science, Tsukuba 305-0044, Japan
    • International Center for Materials Nanoarchitectonics, National Institute for Materials
    • NIMS - Japan
    • National Institute for Materials Science ,Japan
    • National Institute for Materials Science, Tsukuba, 305-0044, Ibaraki, Japan
    • National Institute for Material Science
    • National Institute for Material Science, 1-1 Namiki, Tsukuba 305-0044, Japan
    • National Institute for Material Science Japan
    • 8International Center for Materials Nanoarchitectonics
    • NIMS Tsukuba
    • National Institute for Materials Science: Namiki, Tsukuba, Ibaraki, JP
    • National Institue for Material Science
    • National Institute for Materials Science,1-1 Namiki, Tsukuba, 305-0044, Japan
    • Research Center for Functional Materials, National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan, Research Center for Functional Materials, National In
    • Research Center for Functional Materials, Japan
    • Research Center for Functional Materials, National Institute for Materials Science, 1-1 Namiki, Tsukuba, 305-0044, Japan
    • International Center for Material Nanoarchitectonics, National Institute for Materials Science
    • International Center for Materials Nanoarchitectonics
    • NIMS Suguba
    • NIMS, Tsukuba, Japan
    • National Cheng Kung University
    • National Institute for Materials Science, Namiki 1-1, Tsukuba, 305-0044, Ibaraki, Japan
    • National institute of material science
    • Advanced Materials Laboratory, National Institute for Materials Science, 1-1 Namiki, Tsukuba, 305-0044, Japan
    • Advanced Materials Laboratory, NIMS
    • National Institute for Materials Science, International Center for Materials Nanoarchitectonics
    • National Institute of Material Science, Japan
    • Tsukuba, National Institute for Materials Science
  • Jin Hu

    • University of Arkansas
    • The University of Arkansas
  • Hugh O. H. Churchill

    • University of Arkansas
    • Department of Physics, University of Arkansas
    • Physics, University of Arkansas