Low-loss superconducting coplanar waveguide resonators fabricated with TiN

ORAL

Abstract

Titanium nitride (TiN) is an attractive superconducting material for superconducting circuits due to its high kinetic inductance. Here, we report low-loss superconducting coplanar waveguide (CPW) resonators fabricated with high-quality TiN thin films. As evidenced in X-ray diffraction analyses, single crystalline TiN film is epitaxially sputtered on c-plane sapphire wafers by optimizing its growth condition. CPW resonators with a center line width of 10 μm are fabricated based on TiN films of various thickness. Microwave characterization is performed at millikelvin temperature in low-power and high-power regimes, respectively. The best internal quality factor Qi > 3 million in the single-photon limit and Qi > 12 million in the high power limit. Surprisingly, anomalous film thickness dependence of kinetic inductance is observed, which may originate from varied TiN stoichiometry in the films of different thickness.

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Presenters

  • Wenlong Yu

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory

Authors

  • Ran Gao

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory

  • Wenlong Yu

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory

  • Feng Bao

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory

  • Hao Deng

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
    • Princeton University

  • Xun Jiang

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory

  • Hsiang-Sheng Ku

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
    • Alibaba Group, Alibaba Quantum Laboratory

  • Zhisheng Li

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory

  • Xiaotong Ni

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Group, Alibaba Quantum Laboratory

  • Jin Qin

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory

  • Zhijun Song

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory

  • Hantao Sun

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory

  • Chengchun Tang

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory

  • Tenghui Wang

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
    • Alibaba Group, Alibaba Quantum Laboratory

  • Feng Wu

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
    • Alibaba Group, Alibaba Quantum Laboratory

  • Tian Xia

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory

  • Gengyan Zhang

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
    • Alibaba Group, Alibaba Quantum Laboratory

  • Xiaohang Zhang

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory

  • Jingwei Zhou

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory

  • Xing Zhu

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory

  • Hui-Hai Zhao

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
    • Alibaba Group, Alibaba Quantum Laboratory

  • Chunqing Deng

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
    • Alibaba Group, Alibaba Quantum Laboratory