Dielectric Loss in Titanium Nitride and Aluminum Superconducting Resonators

ORAL

Abstract

Uniquely characterizing loss from two-level systems (TLS) in dielectric materials in coplanar waveguide resonators is challenging due to the nearly proportional scaling of the electric field participation in response to changes in geometry and anisotropic trench depth. With isotropic trenching, however, we can design a set of device geometries where each geometry amplifies the participation of a specific dielectric region. We fabricate this set of devices for both titanium nitride (TiN) and aluminum (Al) resonators and characterize the specific loss tangent of each dielectric for both materials [1]. In this talk, we show that the metal-air interface is the dominant loss in Al devices, whereas each dielectric region contributes significantly in TiN. Lastly, a post-process hydrofluoric (HF) etch reduces losses from the substrate-air interface in TiN devices [2].
[1] Woods, Phys. Rev. Appl. 12, 014012 (2019)
[2] Melville, Appl. Phys. Lett. 117, 124004 (2020)

*This research was supported by the Department of Defense (DOD) under Air Force Contract No. FA8702-15-D-0001. The views and conclusions contained herein are those of the authors and should not be interpreted as necessarily representing the official policies or endorsements of the DOD or the U.S. Government.

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Presenters

  • Alexander Melville

    • MIT Lincoln Lab
    • MIT Lincoln Laboratory
    • Lincoln Laboratory, MIT
    • MIT - Lincoln Laboratory

Authors

  • Alexander Melville

    • MIT Lincoln Lab
    • MIT Lincoln Laboratory
    • Lincoln Laboratory, MIT
    • MIT - Lincoln Laboratory

  • Wayne Woods

    • MIT Lincoln Lab
    • MIT Lincoln Laboratory
    • Lincoln Laboratory, MIT
    • MIT - Lincoln Laboratory

  • Greg Calusine

    • MIT Lincoln Laboratory
    • MIT Lincoln Lab

  • Kyle Serniak

    • MIT Lincoln Lab
    • MIT Lincoln Laboratory
    • MIT-Lincoln Lab
    • Lincoln Laboratory, MIT
    • MIT - Lincoln Laboratory

  • Evan Golden

    • MIT Lincoln Laboratory
    • Lincoln Laboratory, MIT
    • MIT - Lincoln Laboratory

  • Bethany Niedzielski

    • MIT Lincoln Laboratory
    • MIT Lincoln Lab
    • Lincoln Laboratory, MIT
    • MIT - Lincoln Laboratory
    • Massachusetts Institute of Technology MIT

  • David K Kim

    • MIT Lincoln Lab
    • MIT Lincoln Laboratory
    • Lincoln Laboratory, MIT
    • MIT - Lincoln Laboratory
    • Massachusetts Institute of Technology MIT

  • Arjan Sevi

    • MIT Lincoln Lab
    • MIT Lincoln Laboratory

  • Jonilyn Yoder

    • MIT Lincoln Laboratory
    • MIT Lincoln Lab
    • Research Laboratory of Electronics, Massachusetts Institute of Technology
    • Lincoln Laboratory, MIT
    • MIT - Lincoln Laboratory
    • Massachusetts Institute of Technology MIT

  • William Oliver

    • MIT Lincoln Laboratory
    • Research Laboratory of Electronics, Massachusetts Institute of Technology
    • Research Laboratory of Electronics, MIT Lincoln Laboratory, Department of Electrical Engineering and Computer Science
    • MIT Research Laboratory of Electronics, MIT Lincoln Laboratory, MIT Department of Electrical Engineering and Computer Science
    • Massachusetts Institute of Technology MIT
    • Massachusetts Institute of Technology
    • Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology
    • Research Laboratory of Electronics, Massachusetts Institute of Technology, MIT Lincoln Laboratory
    • MIT
    • MIT, MIT Lincoln Lab
    • MIT Lincoln Lab
    • MIT Lincoln Lab, Massachusetts Institute of Technology
    • Research Laboratory of Electronics, Department of Electrical Engineering and Computer Science, and Department of Physics, Massachusetts Institute of Technology. MIT Lincoln L
    • Department of Physics, Department of Electrical Engineering & Computer Science, Research Laboratory of Electronics, MIT Lincoln Laboratory, Massachusetts Institute of Technol
    • Lincoln Laboratory, Research Laboratory of Electronics, and Department of Electrical Engineering & Computer Science, MIT