A study of intrinsic dielectric loss of tantalum based superconducting quantum circuits

ORAL

Abstract

Over the past decade, scientists have devoted tremendous efforts into improving design and fabrication of superconducting qubits, especially materials and interface for higher coherence times [1]. To realize large-scale fault-tolerant quantum computing, the quality of materials and interface of superconducting quantum devices need to be further improved to enhance the coherence times. In this talk, we present our work on thin film deposition and etching of tantalum together with film quality analysis. We studied superconducting resonators and qubits with engineered participation ratios which reveals the intrinsic dielectric loss of the tantalum films. In the end, we will present our work towards superconducting qubits based on Ta/TaOx/Ta Josephson junctions.

[1] W. D. Oliver and P. B. Welander, “Materials in superconducting quantum bits,” MRS Bull., vol. 38, no. 10, pp. 816–825, 2013.

Presenters

  • Xiaohang Zhang

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory

Authors

  • Xiaohang Zhang

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
  • Wenlong Yu

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
  • Feng Bao

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
  • Hao Deng

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
    • Princeton University
  • Ran Gao

    • Alibaba Quantum Laboratory, Alibaba Group
  • Xun Jiang

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
  • Hsiang-Sheng Ku

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
    • Alibaba Group, Alibaba Quantum Laboratory
  • Zhisheng Li

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
  • Xiaotong Ni

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Group, Alibaba Quantum Laboratory
  • Jin Qin

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
  • Zhijun Song

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
  • Hantao Sun

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
  • Chengchun Tang

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
  • Tenghui Wang

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
    • Alibaba Group, Alibaba Quantum Laboratory
  • Feng Wu

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
    • Alibaba Group, Alibaba Quantum Laboratory
  • Tian Xia

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
  • Gengyan Zhang

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
    • Alibaba Group, Alibaba Quantum Laboratory
  • Jingwei Zhou

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
  • Xing Zhu

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
  • Hui-Hai Zhao

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
    • Alibaba Group, Alibaba Quantum Laboratory
  • Chunqing Deng

    • Alibaba Quantum Laboratory Experimental Team, Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory, Alibaba Group
    • Alibaba Quantum Laboratory
    • Alibaba Group, Alibaba Quantum Laboratory