Single crystal diamond membranes for quantum networking and sensing

ORAL

Abstract

Atomic defects in single crystal diamond, such as nitrogen-vacancy centers and silicon-vacancy centers, are promising qubit candidates for quantum communication and sensing. However, there are difficulties to fully utilize their advantages in bulk diamond due to its high refractive index and limited nanofabrication methods. In order to allow better integration flexibility of color centers while maintaining their coherence properties, we developed a process to create high quality, atomically smooth, large-scale single-crystal diamond membranes with no preference on carrying wafer choices. Herein we will present the fabrication steps in detail, including He+ implantation, CVD overgrowth, membrane undercut and transfer, backside etching, and additional patterning. Some recent progress related to the membrane integration will also be demonstrated, namely, nanophotonic cavity integration and strain engineering, which would be beneficial in multi-qubit networks, hybridized quantum systems, and quantum sensing applications.

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This work is supported by UChicago Joint Task Force Initiative and partially by DARPA. The Diamond CVD growth at Argonne National Lab is supported by the US Department of Energy, Office of Science, Basic Energy Sciences, Materials Sciences, and Engineering Division.

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Presenters

  • Xinghan Guo

    • University of Chicago
    • Pritzker School of Molecular Engineering, University of Chicago

Authors

  • Xinghan Guo

    • University of Chicago
    • Pritzker School of Molecular Engineering, University of Chicago

  • Nazar Delegan

    • Argonne National Lab
    • Center for Molecular Engineering and Materials Science Division, Argonne National Laboratory

  • Zixi Li

    • Pritzker School of Molecular Engineering, University of Chicago

  • Tianle Liu

    • University of Chicago
    • Pritzker School of Molecular Engineering, University of Chicago

  • Amy Butcher

    • University of Chicago
    • Pritzker School of Molecular Engineering, University of Chicago

  • David Awschalom

    • University of Chicago
    • Pritzker School of Molecular Engineering, University of Chicago
    • Pritzker School for Molecular Engineering, University of Chicago
    • Center for Molecular Engineering, Materials Science Division, Argonne National Laboratory

  • F. Joseph

    • Argonne National Lab
    • Center for Molecular Engineering and Materials Science Division, Argonne National Laboratory
    • Argonne National Laboratory, Center for Molecular Engineering and Materials Science Division
    • Center for Molecular Engineering, Materials Science Division, Argonne National Laboratory

  • Alexander A High

    • University of Chicago
    • Pritzker School of Molecular Engineering, University of Chicago