High-Q Nanophotonic Resonators on Diamond Membranes using Atomic Layer Deposition TiO<sub>2</sub>

ORAL

Abstract

Nanophotonic resonators are critical elements in solid-state quantum networks, as they can enable coherent light-matter interactions and enhance zero-photon line emission. In diamond, current techniques to fabricate these devices often introduce significant surface roughness, lattice strain, and poorly controlled surface states which limit device performance and scalability. Here, using atomic layer deposition of TiO2, we developed a nanophotonic fabrication platform that avoids substrate and sidewall etching while retaining the potential for high-cooperativity interfacing with color centers in thin diamond membranes. The resulting devices are exceptionally smooth and can be built on arbitrary substrates. In this work, we fabricated ring resonators and 1D photonic crystal cavities (PhCCs) with quality factors exceeding 10^4 and integrated high-Q PhCCs with diamond membranes.

*U.S. DOE, Office of Science, Basic Energy Sciences, MSD. ; Center for Novel Pathways to Quantum Coherence in Materials, an Energy Frontier Research Center funded by the U.S. DOE, Office of Science, Basic Energy Sciences ; DARPA D18AC00015KK1932 ; AFOSR FA9550-19-1-0358 ; NSF GRFP ; the Boeing company.

–

Presenters

  • Amy Butcher

    • University of Chicago
    • Pritzker School of Molecular Engineering, University of Chicago

Authors

  • Amy Butcher

    • University of Chicago
    • Pritzker School of Molecular Engineering, University of Chicago

  • Xinghan Guo

    • University of Chicago
    • Pritzker School of Molecular Engineering, University of Chicago

  • Robert Shreiner

    • University of Chicago

  • Nazar Delegan

    • Argonne National Lab
    • Center for Molecular Engineering and Materials Science Division, Argonne National Laboratory

  • Kai Hao

    • University of Chicago

  • Peter J. Duda, III

    • University of Chicago

  • David Awschalom

    • University of Chicago
    • Pritzker School of Molecular Engineering, University of Chicago
    • Pritzker School for Molecular Engineering, University of Chicago
    • Center for Molecular Engineering, Materials Science Division, Argonne National Laboratory

  • F. Joseph

    • Argonne National Lab
    • Center for Molecular Engineering and Materials Science Division, Argonne National Laboratory
    • Argonne National Laboratory, Center for Molecular Engineering and Materials Science Division
    • Center for Molecular Engineering, Materials Science Division, Argonne National Laboratory

  • Alexander A High

    • University of Chicago
    • Pritzker School of Molecular Engineering, University of Chicago