On-chip Multiplexing of Si/SiGe Quantum Devices

Integrated on-chip control logic is an enabling technique on the path towards high-throughput qubit characterization and large-scale quantum processors in the solid state. We present the fabrication and measurement of a multiplexed array that addresses sixteen Si/SiGe quantum devices. On-chip field-effect transistors allow an array of Hall bars fabricated using electron-beam lithography to be measured with a tenfold reduction in electrical interconnects. We report transport measurements of the Hall bars at 2 Kelvin and discuss variations in threshold voltage, electron mobility, and percolation threshold density across chip.