A 22nm FD-SOI-CMOS Scalable Quantum Processor SoC with Fully Integrated Control Electronics at 3.5K

Silicon based Qubits have been proposed as an alternative to Josephson junction structures when it comes to scaling the quantum processor from hundreds to a thousand Qubits. The control electronics in such system needs to generate a unique RF control and DC bias per Qubit without exceeding the thermal budget of the cryocooler. This paper describes a monolithic integration of the semiconductor quantum core and its associated classic control circuitry manufactured in the 22FDX fully depleted silicon-on-insulator (FD-SOI) technology from GlobalFoundries. The quantum control signal is synthesized from a single RF reference clock that drives the pulse generator for timing control and the 8bit capacitive DAC for amplitude control. The on-chip cryogenic memory stores unique patterns to generate various quantum gate behaviors. The readout circuits use a sampled architecture designed to reduce the common-mode and flicker noise in the front-end. In addition, a fully integrated bias generation system using a single input reference is proposed for a moderately complex 2D quantum structure. The combined area of the entire control circuitry is 0.042mm² while the total power consumption with a reference clock 2.5GHz is 10.7mW at 3.5K.