Extending Superconducting Qubits Out of Plane (Part 2): Through-Silicon Vias

ORAL

Abstract

Addressing complex arrays of high coherence qubits is a necessary capability for the construction of a quantum processor. To enable high connectivity of superconducting qubits we are utilizing heterogeneous 3D integration of a qubit tier, an interposer with high-aspect-ratio superconducting through-silicon vias (TSVs), and a superconducting multi-chip module. In part 2 of this talk we will focus on the fabrication of TSVs within the interposer tier and their implementation within multi-tier stacks.

*This research was funded by the Office of the Director of National Intelligence (ODNI), Intelligence Advanced Research Projects Activity (IARPA) and by the Assistant Secretary of Defense for Research & Engineering under Air Force Contract No. FA8721-05-C-0002. The views and conclusions contained herein are those of the authors and should not be interpreted as necessarily representing the official policies or endorsements, either expressed or implied, of ODNI, IARPA, or the US Government.

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Presenters

  • Justin Mallek

    • MIT Lincoln Laboratory

Authors

  • Justin Mallek

    • MIT Lincoln Laboratory

  • Jonilyn Yoder

    • MIT Lincoln Laboratory
    • MIT-Lincoln Lab
    • Lincoln Laboratory, Massachusetts Institute of Technology (MIT)
    • MIT Lincoln Lab

  • Donna-Ruth Yost

    • MIT Lincoln Laboratory

  • Rabindra Das

    • MIT Lincoln Laboratory
    • MIT Lincoln Laboratories

  • Alexandra Day

    • MIT Lincoln Laboratory
    • Massachusetts Institute of Technology MIT

  • Danna Rosenberg

    • MIT Lincoln Laboratory
    • MIT Lincoln Lab
    • MIT Lincoln Laboratories
    • Massachusetts Institute of Technology

  • Greg Calusine

    • MIT Lincoln Lab
    • MIT Lincoln Laboratory

  • Matthew Cook

    • MIT Lincoln Laboratory

  • Evan Golden

    • MIT Lincoln Laboratory
    • Massachusetts Institute of Technology MIT

  • David K Kim

    • MIT Lincoln Laboratory
    • MIT Lincoln Lab
    • MIT-Lincoln Lab
    • MIT Lincoln Laboratories
    • Lincoln Laboratory, Massachusetts Institute of Technology (MIT)
    • Massachusetts Institute of Technology (MIT) Lincoln Laboratory

  • Alexander Melville

    • MIT Lincoln Laboratory
    • MIT Lincoln Lab
    • MIT Lincoln Laboratories
    • Massachusetts Institute of Technology (MIT) Lincoln Laboratory

  • Bethany Niedzielski

    • MIT Lincoln Laboratory

  • Mollie Schwartz

    • MIT Lincoln Laboratory
    • MIT Lincoln Lab

  • Corey Stull

    • MIT Lincoln Laboratory

  • Sergey Tolpygo

    • MIT Lincoln Laboratory

  • Wayne Woods

    • MIT Lincoln Lab
    • MIT Lincoln Laboratory

  • William Oliver

    • Research Laboratory of Electronics, Department of Electrical Engineering and Computer Science, Department of Physics, MIT Lincoln Laboratory, Massachusetts Institute of Techn
    • MIT Lincoln Lab
    • MIT Lincoln Laboratory
    • MIT Lincoln Laboratory, Massachusetts Institute of Technology
    • Department of Physics, Department of Electrical Engineering and Computer Science, Research Laboratory of Electronics, Lincoln Laboratory, Massachusetts Institute of Technology
    • Research Laboratory of Electronics, Massachusetts Institute of Technology MIT
    • Massachusetts Institute of Technology MIT
    • Department of Electrical Engineering and Computer Science, Department of Physics, Massachusetts Institute of Technology; MIT Lincoln Laboratory
    • Department of Electrical Engineering and Computer Science, Department of Physics, MIT Lincoln Laboratory, Massachusetts Institute of Technology
    • Massachusetts Institute of Technology
    • Research Laboratory of Electronics, Massachusetts Institute of Technology
    • Research Laboratory of Electronics, Department of Electrical Engineering & Computer Science, Department of Physics, Massachusetts Institute of Technology and MIT Lincoln Labo
    • Physics, MIT
    • MIT-Lincoln Lab
    • MIT Lincoln Laboratories
    • Research Laboratory of Electronics, Department of Physics, Department of Electrical Engineering and Computer Science, Lincoln Laboratory, Massachusetts Institute of Technolog