Lithographic bandgap engineering of graphene on the 10 nm scale: the role of edges

 · Invited

Abstract

In the light of graphene’s rich electronic properties and potentially high performance in applications, one of the most obnoxious roadblocks have been to pattern graphene on a small scale. Early theoretical work predicted that the bandstructure of graphene could be engineered by nanopatterning, such as nanoribbons and antidot lattices. Unfortunately, edge disorder and contamination associated with typical lithographic processes have strong detrimental effects on the transport properties. This has held back efforts to utilize quantum confinement in practical graphene devices as well as downscaling graphene components to a scale comparable to mainstream silicon electronics. The key is to control the chemistry and roughness of the edges, which has a striking impact on charge distribution and scattering in graphene, as illustrated by breakdown of the Quantum Hall Effect and ferroelectric behavior in graphene devices. By careful patterning through the hexagonal boron nitride encapsulation layer, we fabricated graphene devices with 35 nm pitch hole arrays and nm-scale edge roughness, yet exceptionally high carrier mobility. The distinct magnetotransport features are in quantitative agreement with zero-parameter tight-binding calculations and analytical models, including a ca. 150 meV bandgap. In addition we find that the subtle moiré-superlattice signatures associated with a small finite twist angle between the graphene and hexagonal boron nitride survives the aggressive lithographic patterning, suggesting that nanoscale circuits and components that exploit the novel properties of twisted 2D layers are feasible.

*Project DNRF103. EU H2020 ‘Graphene Flagship’, grant agreements 696656, 785219. VKR Center of Excellence QUSCOPE by the Villum Foundation. Villum Fonden project no. VKR023117. Elemental Strategy Initiative by MEXT (Japan), JSPS KAKENHI grants nos. JP18K19136 and CREST (JPMJCR15F3), JST.

Presenters

  • Peter Bøggild

    • DTU Physics, Technical University of Denmark

Authors

  • Lene Gammelgaard

    • DTU Physics, Technical University of Denmark
  • Bjarke Sørensen Jessen

    • DTU Physics, Technical University of Denmark
  • Jose Manual Caridad

    • DTU Physics, Technical University of Denmark
  • Morten Rishøj Thomsen

    • Department of Physics, Ålborg University
  • Timothy John Booth

    • DTU Physics, Technical University of Denmark
  • Takashi Taniguchi

    • National Institute for Materials Science, Japan
    • National Institute for Material Science
    • National Institute for Materials Science
    • National Institute for Materials Science, Tsukuba
    • Research Center for Functional Materials, NIMS
    • nims
    • Advanced Materials Laboratory, National Institute for Materials Science
    • National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan
    • NIMS
    • National Institute for Material Science - Japan
    • NIMS Tsukuba
    • National Institute for Materials Science, Namiki 1-1, Ibaraki 305-0044, Japan.
    • National Institute for Materials Science (NIMS)
    • National Institute for Materials Science,Tsukuba, Ibaraki 305-0047, Japan
    • Advanced Materials Laboratory, NIMS, Japan
    • National Institute for Materials Science,1-1 Namiki, Tsukuba, 305-0044, Japan
    • National Institute of Materials Science
    • National Institute for Materials Science, University of Tsukuba
    • National Institute for Materials Science, Tsukuba, Japan
    • National Institue for Material Science, Tsukuba
    • Advanced Materials Laboratory, NIMS
    • Advanced Materials Laboratory, National Institute for Materials Science, Tsukuba 305-0044, Japan
    • Advanced Matrials Lab, NIMS
    • National Institute for Material Science, Tsukuba, Japan
    • National institute for materials science
    • NIMS-Tsukuba
    • NIMS, Japan
    • National Institute for Materials Science, Namiki Tsukuba Ibaraki, Japan
    • Advanced Materials Laboratory, National Institute for Materials Science, Tsukuba, Japan
    • NIMS Japan
    • National Institute for Materials Science, Tsukuba, Ibaraki 305-0044, Japan
    • Research Center for Functional Materials, National Institute for Materials Science, Tsukuba, Ibaraki, Japan
    • Advanced Materials Laboratory, National Institute of Materials Science
    • Advanced Materials Laboratory, National Institute for Materials Science 1-1 Namiki, Tsukuba, 305-0044, Japan
    • National Institute of Material Science, 1-1 Namiki, Tsukuba 305-0044, Japan
    • National Institute for Material Science (Japan)
    • Physics, NIMS
    • National Institute of Materials Science, Japan
    • National Institute of Materials Science, Tsukuba, Ibaraki 305-0044, Japan
    • NIMS - Tsukuba
  • Kenji Watanabe

    • National Institute for Materials Science, Japan
    • National Institute for Material Science
    • National Institute for Materials Science
    • National Institute for Materials Science, Tsukuba
    • Research Center for Functional Materials, NIMS
    • nims
    • Advanced Materials Laboratory, National Institute for Materials Science
    • National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan
    • NIMS
    • National Institute for Material Science - Japan
    • NIMS Tsukuba
    • National Institute for Materials Science, Namiki 1-1, Ibaraki 305-0044, Japan.
    • National Institute for Materials Science (NIMS)
    • National Institute for Materials Science,Tsukuba, Ibaraki 305-0047, Japan
    • Advanced Materials Laboratory, NIMS, Japan
    • National Institute for Materials Science,1-1 Namiki, Tsukuba, 305-0044, Japan
    • National Institute of Materials Science
    • National Institute for Materials Science, University of Tsukuba
    • National Institute for Materials Science, Tsukuba, Japan
    • National Institute for Material Science, Japan
    • National Institue for Material Science, Tsukuba
    • Advanced Materials Laboratory, NIMS
    • Advanced Materials Laboratory, National Institute for Materials Science, Tsukuba 305-0044, Japan
    • Advanced Matrials Lab, NIMS
    • National Institute for Material Science, Tsukuba, Japan
    • National institute for materials science
    • NIMS-Tsukuba
    • NIMS, Japan
    • National Institute for Materials Science, Namiki Tsukuba Ibaraki, Japan
    • NIRM
    • Advanced Materials Laboratory, National Institute for Materials Science, Tsukuba, Japan
    • NIMS Japan
    • National Institute for Materials Science, Tsukuba, Ibaraki 305-0044, Japan
    • Research Center for Functional Materials, National Institute for Materials Science, Tsukuba, Ibaraki, Japan
    • Advanced Materials Laboratory, National Institute of Materials Science
    • Advanced Materials Laboratory, National Institute for Materials Science 1-1 Namiki, Tsukuba, 305-0044, Japan
    • National Institute of Material Science, 1-1 Namiki, Tsukuba 305-0044, Japan
    • National Institute for Material Science (Japan)
    • Physics, NIMS
    • National Institute of Materials Science, Japan
    • National Institute of Materials Science (NIMS)
    • National Institute of Materials Science, Tsukuba, Ibaraki 305-0044, Japan
    • NIMS - Tsukuba
  • Joachim Dahl Thomsen

    • Materials Science and Engineering, Massachusetts Institute of Technology
  • David Mackenzie

    • Department of Electronics and Nanoengineering, Aalto University
  • Thomas G Pedersen

    • Department of Physics, Ålborg University
  • Mads Brandbyge

    • DTU Physics, Technical University of Denmark
  • Antti-Pekka Jauho

    • DTU Physics, Technical University of Denmark
    • Center for Nanostructured Graphene, Technical University of Denmark, 2800 Kongens Lyngby, Denmark
  • Peter Bøggild

    • DTU Physics, Technical University of Denmark